0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

Compact Hydraulic Cylinder

Modify the detecting position while the auto switch is secured at the position of (3) in the figure. a Auto switch mounting screw M3 x 0.5 x 8 L (For BQ-1) Auto switch Set screw (Unused) r u t c e y Auto switch mounting bracket d Auto switch mounting screw M2.5 x 0.45 x 6 L b Square nut (For BQ-1) w Cylinder q BQ-1 and BMU1-025 are a set of a and b shown above.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

VCHC ASR ASQ 669 AS-FG Series Construction Elbow type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread e e !0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled (Free) flow Flow rate (l/min (ANR)) 1710

Electro-Pneumatic Proportional Valve Series VEF/VEP

Characteristics JIS B 8372 (In accordance with air regulator) SRF 1(P) 2(A) 3(R) VCHR (Inlet pressure) (Outlet pressure) Set point ITV IC ITVX PVQ Inlet pressure (MPa) VEF VEP VEF VEP 3(R) 2(A) Flow rate (L/min (ANR)) 1(P) 2(A) Inlet pressure: 0.3 MPa VER Set point VEA VY1 VBA VBAT Inlet pressure (MPa) AP100 Set point 3(R) 2(A) Flow rate (L/min (ANR)) 1(P) 2(A) Inlet pressure (MPa) 889

3 Port Air Operated Valve Series SYJA300 1

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

11-cq2-e

Contents Bore size (mm) CQ2A32-L-PS CQ2A40-L-PS CQ2A50-L-PS CQ2A63-L-PS CQ2A80-L-PS 32 40 50 63 80 100 CQ2A32-L-PS CQ2A40-L-PS CQ2A50-L-PS CQ2A63-L-PS CQ2A80-L-PS CQ2A100-L-PS !4 !5 !6 Set of left nos. !4, !5, !6. Rod seal Piston seal NBR Tube gasket CQ2A100-L-PS Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size.

CQS

L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 26 26 32 35.5 14 15.5 18.5 22.5 24 25.5 28.5 32.5 5 to 30 5 to 30 5 to 50 5 to 50 3.5 3.5 4.5 5 13.5 13.5 14.5 15 35 to 100 35 to 100 75 to 200 75 to 300 51 51 63.5 67 32 32 41 44 Bore size (mm) Rod end male thread FD FT FV FX FZ 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39

CLS

H BY B RR Z + Stroke ZZ + Stroke BW With rod boot 180, 200, 250 BV e BZ BG BE l f 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) Z1 + l + Stroke ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 B E FA GA L A AL BA BB BC BD BE BG BZ BV BW BP CDH10 C CX CT D EA F GB GC H J K KA M BY 0.1 0.3 +0.084 0 32 36 40 50 50 63 14 14 14 17 17 20 50 50 56 63 63 71

PSxx-OMV0003CN

bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y 1110 0x0456 0 R/W drE () U8 0 Y 0 1(1/10) 1140 0x0474 0 R/W Cut (Zero-cut) U8 0 Y 010 0 0 1.0% 1800 0x0708 0 R/W Eco () U8 0 Y 0oFF 1on Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0 Y 0999 a F32 N 2000 0x07D0 0 R (63 ) 2001 0x07D1 0 R b F32 N 2002 0x07D2 0 R U16 0 N 6163 2003 0x07D3 0 R

PSxx-OMV0008CN

(19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

VM

R. 3 port only Force Component Parts POM PBT Material Note No.

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

Vacuum Filter AFJ Series

4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Air Tank Series AT 1

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire

MTS

(15) D-M9, D-M9V 0 15 27 (39) 5 (17) d d 8 Data D-F8 0 15 47 25 L L D-F9W, D-F9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style ( ): Denotes the values of D-A9V, D-M9V and D-F9WV. (1) (2) (3) (4) Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 0 28 28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

Dedicated Controller

I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C RUN Directs a program operation. Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP JOG Executes a JOG operation. JOG operation mode HOLD /BS UP L R MON Monitors operating condition. Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.