5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry F: Plug-in Option Port size Nil 01 Without sub-plate Rc 1 8 02 Rc 1 4 2 50 01 F Z VZS3 1 Plug-in 5 G 50 VZS3 01 Non plug-in 2 Symbol Coil rated voltage Thread type Option 2 position single 1 2 3 4 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220

Double acting single rod ; XB6 and XB7 bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 ; XB14 bore sizes (mm): 16, 20, 25, 32, 40, 50, 63 ; Mounting include: Through hole (standard), threaded, clevis, foot, head flange, and rod flange ; Low temperature option (XB7) temperature range -40°F to 158°F ; High temperature option (XB6) temperature range 10°F to 302°F ; Heat resistant auto

Double acting single rod ; XB6 and XB7 bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 ; XB14 bore sizes (mm): 16, 20, 25, 32, 40, 50, 63 ; Mounting include: Through hole (standard), threaded, clevis, foot, head flange, and rod flange ; Low temperature option (XB7) temperature range -40°F to 158°F ; High temperature option (XB6) temperature range 10°F to 302°F ; Heat resistant auto

Double acting single rod ; XB6 and XB7 bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 ; XB14 bore sizes (mm): 16, 20, 25, 32, 40, 50, 63 ; Mounting include: Through hole (standard), threaded, clevis, foot, head flange, and rod flange ; Low temperature option (XB7) temperature range -40°F to 158°F ; High temperature option (XB6) temperature range 10°F to 302°F ; Heat resistant auto

S070

tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry G Grommet C Plug lead with light/ surge voltage suppressor Power consumption Pressure specification Flow rate Power consumption (W) Maximum operating pressure (MPa) 0.1 0.3 0.3 0.5 0.1 0.3 Cv factor Symbol 0.021 0.011 0.021 0.011 0.011 0.006 A B C D E Note) 0.35 0.5 0.1 (With power saving circuit) F

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ4000-22A For VZ42 AN110-01 Noise reduction: 21 dB (13 x 38l ) AN203-02 Noise reduction: 25 dB (16 x 36l ) Description R 1/8 R 1/4 (2) Silencer Note 1) For body ported type Note 2) For sub-base mounted type 4-15-10 11 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 How to Order Option 01 1 2 VZ4 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Only body

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

VQ

How to Order Valve VQ1 1 0 5 F Manual override Series VQ Compact 3 port valve Non-locking push flush style Locking slotted style B : Option Actuation 1 2 Normally closed Normally open Electrical entry Plug-in style With indicator light and surge voltage suppressor (Only for plug-in manifold) F Functions Standard (1W) High pressure (1.5W) Low wattage (0.5W) Large flow capacity H Y U Coil

NARM Series

Under certain circumstances, the use of an electronic type pressure gauge is recommended. 22 0 0 43.5 58 72.5 87 101.5 Supply pressure (psig) 142 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Dimensions Dimensions Symbol A B C D E F G H J K M P Q R Model NARM1000 .18 .98 1.34 .83 .71 2.20 .63 .35 .71 .75 2.05 .35 .45 .19 (4.5) (25) (34) (21) (18) (

VZ3000

Combinations of Solenoid Valve and Gasket Round head combination screw M2.5 x 25 (With spring washer) Made to Order Specifications (For details, refer to page 3-3-85.)

EX600-W

E 16 outputs D-sub connector (25 pins) F 16 outputs Spring type terminal block (32 pins) For specications, refer to the Fieldbus system EX600 series in the Web Catalog.

Compact Rotary Actuator

Please refer the table on the next page for inertia moment calculation. -24- Table for calculation of Inertia moment -25- 5-2 Kinetic energy Table 8 shows the allowable kinetic energy of the rotary actuator.

VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

CHA

Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 Accessories (Options) 25 to 1000 25 to 1000 25 to 1300 Bracket pin, Knuckle bracket, Knuckle pin, Knuckle, Y-type knuckle, Rod end nut 25 to 1500 50 to 1300 Refer to pages 408 and 409 for part numbers and dimensions. 50 to 1500 Note) Refer to pages 232 and 233 to determine stroke limitation depending

Compact End Lock Cylinder Series CBQ2

A + Stroke DL LL DM MO HR W 32 45 25 15 22 15 33.5 DM With front lock 40 52.5 29 21 26 19 38.5 50 59 29.5 21 24 19 45 63 64 28.5 21 25 19 50 63 cylinder tube configuration Q F A + Stroke B + Stroke Rod end male threads (mm) With rod end male threads H1 Bore size (mm) L1 C1 X H1 32 20.5 23.5 M14 x 1.5 28.5 40 20.5 23.5 M14 x 1.5 28.5 50 26 28.5 M18 x 1.5 33.5 C1 63 26 28.5 M18 x 1.5 33.5 X

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

XSA Series

49.5 50 57 25.5 63 67 55 55 102 57 71 -2V 56 35 22 29.5 -43S 64.5 31 3/8 -43V 67 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 25 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 -32V 56 -43S 64.5 31 3/8 -43V 67 82.5 72 58.5 66 72 64 66 12 XSA-OMS0001-A Rc, NPT Ports Grommet G Fitting size 2 x M5 thread depth M Grommet: GS Conduit: C Flat terminal: F Terminal part Flat terminal connector

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 How to Order Integration of a quick exhaust valve and an exhaust restrictor permits high-speed cylinder operation. 3 1 0 F 01 06 ASV S K Speed exhaust controller Option Nil None The effective area is two times larger.

Thermo-chiller

2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating uid system Pump capacity Particle lter nominal ltration rating (Accessory) [m] 5 Circulating uid outlet, circulating uid return port CH1: Rc1 (Symbol F: G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2)