CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Nozzle Type Ionizer

mA Residual voltage: 1 V or less (Load current at 40 mA) Max. applied voltage: 26.4 VDC Max. load current: 40 mA Residual voltage: 1 V or less (Load current at 40 mA) Error signal Output signal Maintenance signal Effective static neutralization range 20 to 500 mm Ambient temperature (Operating/Stored) 0 to 55C Ambient humidity (Operating/Stored) 35 to 65% RH (No condensation) Housing ABS

OMU0023

AREA A position 2 The AREA signal is output commonly for the ranges set for both the AREA A and AREA B. AREA B Set as AREA 1 AREA 2. position 1 AREA B position 2 48 - Data (Saved data) Data is sent as hexadecimal numbers.

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

IDX-OM-U022

() IDFA100F150F i 7 i.3 IDX-OM-U022 1. 1.1 i.2.9 1 2 IDF100FA-40 C.RV IDFA100F-40-CRV.

FQ1

Part number Dimensions Filtration accuracy (m) Element symbol 5 10 20 40 74 105 EM500-005 EM500-010 EM500-020 EM500-040 EM500-074 EM500-105 L005 L010 L020 L040 L074 L105 L005 L010 L020 L040 L074 L105 FQ1 0 1 2 10 N B Q005 65 x 250mm Element type Select from tables on the right.

PC Wiring System Series PCW

8 6 4 2 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 Input/output connector (CS0) 3 7 5 1 39 37 35 33 31 29 27 25 23 21 19 17 15 13 11 9 Power supply terminal block 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS1) 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3

IDX-OM-M051

Replacement method Standard replacement period Refrigerating compressor 1 B 20,000 hours (6 years) Plate type heat exchanger 1 B 20,000 hours (6 years) Water regulating valve 1 B 20,000 hours (6 years) High pressure switch 1 B 20,000 hours (6 years) Low pressure switch 1 A 20,000 hours (6 years) Magnetic contactor 1 A 20,000 hours (6 years) Programmable controllers 1 A 20,000 hours (6 years

With Factory Installed

B B B p AW3001 220.5 213.5 219.5 240.5 AW4001 272 265 271 292 IN-OUT reversal mounting "'" DimenSions except B are same as the standard type.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73

Vacuum Equipment

Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Clean Gas Filter

MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Steam Valve

20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135