Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Return Filter FH100 Series

Differential pressure indicator e Seal washer order no.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y Auto-drain type w ITVX !0 PVQ o r VY1 VBA VBAT AP100 Drain Port size 1 4 Drain Component Parts Replacement Parts No. Description AMR3000 AMR4000 AMR5000 AMR6000 Model Material Qty Part no. Description No.

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

This lowers the pressure in the diaphragm chamber q and the force generated by the pressure regulator spring e pushes down the diaphragm.

4-channel Flow Monitor ( compatible)

Remarks Power supply/output cable ZS-26-L Length 2 m For PF2A5##, PF2W5##, PF3W5## Connector for sensor lead wire (e-con) ZS-28-CA-4 1 pc., Finished outside diameter: 1.15 to 1.35 Cover colour: Blue For PF2D5## Connector for sensor lead wire (e-con) ZS-28-CA-2 1 pc., Finished outside diameter: 0.9 to 1.0 Cover colour: Red Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof

PF-OMN0011_C

[F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

HRX-OM-W069

Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

HRX-OM-Z015

Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

High Vacuum L Type Valve

C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

HRX-OM-W032

Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B Pump E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

KK/KK13

No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Body Valve Valve seat Collar Spacer Lock ring Sleeve Chuck Valve O-ring Valve seat O-ring Plug O-ring Valve spring Sleeve spring Cassette Seal Stem Cassette Seal Brass PBT PBT PBT PBT PBT Cold rolled carbon steel sheet Stainless steel FPM NBR NBR Stainless steel Stainless steel NBR Brass NBR Electroless nickel plated Electroless nickel plated 4 S e

MLGC

If the guide rod is twisted or bent, its operating resistance will become very high, causing its bearings to wear prematurely and its performance to be lowered. e Install the cylinder in an area in which it can be serviced easily.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

VSA4

E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

VFN2000N

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

Table of Contents

Function Coil voltage Light/Surge voltage suppressor AC Symbol Specifications DC (1.0 W) (1) 1 3 5 6 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 24 VDC 12 VDC Standard type Nil Yes None Nil (2) (1.5 W) (0.5 W) H High pressure type E (2) Low wattage type Y Note 1) For power consumption of AC type, refer to page 2-410.