MY1

26 32 43.5 60 VV 16 19 23 28 30 TT 15.5 21 22.5 35 43 WW 11 13 20 22 25 UU 16 16 24.5 24 28 XX 38 48 54 74 92 SS 3.5 4 10.5 10 13 RR 19 24 25.5 35 49 "P" indicates cylinder supply ports.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

VQC

0 (Terminal block) T Kit 21 Note) Drawing shows VQC1000 type. VQC Base-Mounted Type Manifold Exploded View Manifold Assembly Part No. Housing assembly and SI unit/Input block Description Note Applicable model Part no. No.

TABLE OF CONTENTS

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Table of Contents

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Motor LEFS32 5H9 ( ) depth 5 +0.030 0 (122) Encoder cable (7) Body mounting Note 1) reference plane 4 x M6 x 1 thread depth 9.9 70 42 Motor cable (7) 44 60 5.5 +0.030 0 5H9 ( ) depth 5 Motor option: With lock (2.2) L Encoder cable (7) A (Table traveling distance: Stroke + 6) Note 2) Motor cable (7) (201) (62) 10 62 70 (66) Stroke (64) Encoder Z-phase detecting position Note 3) (231) 48 21

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030

CRB2/CRBU2/CRB1

depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 82 98 3 8 14 21 80 39 5 34 83 17 45 52 60 8 75 9 R30 CDRB1BW 63-E CDRB1BW 8030 32 M8 x 1.25 depth 12 17 0.006 0.017 30 0 0.052 1/4 R8 95 110 3 8 15 21 90 48 5 34 94 19 53.5 63 70 7.5 88 9 R30 CDRB1BW 80-E CDRB1BW 100M10 x 1.5 depth 13 25 0.007 0.020 45 0 0.062 1/4 R11 125 140 4 13 11.5 21 103 60 5 39 120 28 65 78 80 7.5 108 11 R30 CDRB1BW

C95

115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50

EXxx-OMN0037CN

0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR

5 Port Solenoid Valve, Series VQC

Note) Drawing shows VQC1000 type. 21 Base-Mounted Type Manifold Exploded View Series VQC Manifold Assembly Part No.

Vacuum Pad

19 24.5 30.5 6 Width across flats 21 35 4 35 4 3 3 ZP3P-T35PTSF-AG3 [Weight: 21.1 g] ZP3P-T50PTSF-A12 [Weight: 28.4 g] 24 M12 x 1.75 G3/8 24 Width across flats 21 22 28.2 35.5 7.3 19 24.5 7 31.5 Width across flats 21 4 35 4 3 4.5 50 ZP3P-T50PTSF-AG2 [Weight: 22.2 g] ZP3P-T50PTSF-AG3 [Weight: 28.8 g] G3/8 24 Width across flats 21 G1/4 24 Width across flats 21 22 27.5 7 34.5 22 27.5 6 33.5

C95

37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18 20 23 27 30 51 54 65 67 86 96 32 36 45 50 63 71 32 40 50 63 80 100 10.5 12 15 15 18 18 14 16 21 21 25 25 Centre trunnion Bore (mm) TC B TA TF Part No.

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.