Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

(Or None in the Case of No Switch), Made-to-Order: X10 [Long Stroke (101 to 200mm)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K (Operation Manual, Calibration

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: C [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow

JXCx-OMU0022

. -6- Revision history First edition: February 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

Controller setting Software (ACT Controller)

. -29JXC-OMU0010-A Revision history : First edition [Oct 2016] A : Contets revised in sevrral places [Mar 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2020 SMC Corporation All Rights Reserved

AC Servo Motor Driver (Parameter Configuration using Setup software (MR Configurator2 TM ))

./2015 2nd printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 13 -

Card Motor Controller Controller Setting Software for LATCA （ For Windows®7 ）

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Card Motor Controller Controller Setting Software for LATCA (For Windows®8.1)

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Card Motor Controller Controller Setting Software for LATCA （ For Window ®10 ）

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

MHx-OMY0001

. -18- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 19 -

IDX-OM-W032

IDX-OM-W032 12 V 12-2 Drain tube (O.D. 10m) (10) IDFA22E,37E,55E,75E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30sec IDFA Series 12-2 122 IDX-OM-W032 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 0.5 0.5 5 ON:SEC OFF:MIN 12-4 R 6-4 6-3 T 11-6 11-3 IDFA Series 12-3 123 IDX-OM-W032 13 13 13-1 / IDFA Series 13-1 13-1 D:2021/11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-W035

IDFB22E-11-V IDFB22E/37E-23-V IDFB55E/75E-23-V IDF-S0199 IDF-S0198 IDF-S0302 240psi (1.6MPa) AC115V10% (60Hz) AC230V10% (60Hz) AC230V10% (60Hz) ON 0.5sec OFF 0.5min 12-3 ON OFF 4 6 2 3 2 8 1 4 10 0.5 5 0.5 ON:SEC OFF:MIN 12-4 V 6-4 6-3 T 11-6 11-4 12-2 IDFB Series 12-2 IDX-OM-W035 13 13 13-1 / IDFB Series 13-1 13-1 A2019/11 B2021/5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Clean Air Filter

Dimensions SFD110-C** SFD110-C** dimensions Model A B C04 4 81 SFD110C06 6 81 C08 8 82 SFD110-*02* Bracket mounting dimensions Hole shape for bracket mounting *Use a countersunk head screw (M3) for bracket mounting 9 Document No.DOC1018377 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications

IR10-OM00007

. -1EXH 7 1 4 -11- -12-12- Revision history A Sectional view filter deletion of P.5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved