Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: NPT, Control Unit: Air Release Valve, Blank Plates for Filter Regulator & Press. Switch, Voltage: 24VDC
Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: NPT, Control Unit: AirReleaseValve, FilterReg w/Press.Diff.Drain, BlankPlate for Press.Sw., Voltage: 100VAC 50/60HZ
Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 4 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: AirReleaseValve, FilterReg w/Press.Diff.Drain, BlankPlate for Press.Sw., Voltage: 100VAC 50/60HZ
Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A5 (M5X0.8)
Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GN (Conductive NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb
Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb
Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb
EXxx-OML0010CN Terminal Setting Contrast LCD9(08) 4 Bright LCD5(04) 2 Key Sound 5(04) 2 PowerSave 5(137 10) 1M Default Password Change 48 0 -47No.EX-OML0010CN-C Password Change() Password Change A,BZ, 0,19 "Wrong Password" -48No.EX-OML0010CN-C "PASS""WORD" "PASS" "*" "WORD" () -49No.EX-OML0010CN-C No.
Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.
(Request):0110B000204018F00014D [CR][LF] (Response):0110B0002E2 [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 10 Function 10 Function 000B Head address of specified register 000B Head address of register to write 0002 Quantity of register to write 0002 Quantity of register to write 04 Quantity of byte to read E2 LRC 018F Information
(Request):0110B000204018F00014D [CR][LF] (Response):0110B0002E2 [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 10 Function 10 Function 000B Head address of specified register 000B Head address of register to write 0002 Quantity of register to write 0002 Quantity of register to write 04 Quantity of byte to read E2 LRC 018F Information
(Response):0110005100029C [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 10 Function 10 Function 0051 Head address of specified register 0051 Head address of register to write 0002 Quantity of register to write 0002 Quantity of register to write 04 Quantity of byte to read 9C LRC 0BB8 Information written to 0051H (Target temperature
AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm 20 8-1 A() 8-2 2 15 0.3MPa 30 21 M4x10 LOCK FREE 8-3 () 2 15 0.3MPa 30 [LOCK] 22 8-4 MPa () () mm 40 50 63 80 100 N 882 1370 2160 3430 5390 )15% 23 8-5 (kgf) (kgf) (mm/s) (mm/s) 24
YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80
90 Series 7-4 IDX-OM-W094 7.5 IDFA60/70/80/90 Series 7-5 IDX-OM-W094 A 8 A 8.1 8.2 A (10) 8.3 8.4 IDFA60-20-A IDFA70-20-A IDFA80-20-A IDFA90-20-A 10 m 3/min(ANR) 186 300 462 576 10 1) ANR 65% 2) IDFA60/70/80/90 Series 8-1 IDX-OM-W094 A 8.5 IDFA60/70/80/90 Series 8-2 IDX-OM-W094 C 9 C 9.1 9.2 1) 2) IDFA60/70/80/90 Series 9-1 IDX-OM-W094 L 10 L L 10.1 0 () 10.2 ADH4000-04
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.