Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket), Calibration
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: Rc, Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)
Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: E (Out 1: PNP; Out 2: Analog 1 to 5 V), Option 1: N (w/o Lead Wire and M8 Connector), Unit Specification: M (SI Unit Only), Option 2: R (w/Bracket)
Indicator: S, Control Range: M (1 to 50mm/s), Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: M5 (M5 x 0.8)
Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: E (Push-turn Locking Manual Override)
Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: E (Push-turn Locking Manual Override)
Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: E (Push-turn Locking Manual Override
Size: 100, Motor Mounting Position: R (Right Side Parallel), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: B (10mm), Stroke: 300mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: H (Foot Bracket for Parallel Motor), Actuator Cable: S (Standard Cable), Actuator Cable Length: A (10m), Driver Type: E2 (LECSN2-T9-E/EtherCAT®, 200V to 240V), I/O Cable
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If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.
Size: 1/2, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: B+E, Option 1: None, Option 2: R+Y
Size: 3/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: E+H, Option 1: None, Option 2: R+Y
Size: 1/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/8, Accessory: B+E, Option 1: None, Option 2: R+Y