•

ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

MK

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5.5 S T K (3.3) D 4-G through R + Clamp stroke X Z C 0.2 2 x 4-H counterbore Q + 2 x Clamp stroke + 0.15 + 0.05 2-3.3 depth 3 K A P Both ends tapped style: MKA A thread (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) Q A G I J S T B H K L O U C P V D E R X

Compact Electric Actuator Series LG1

26 Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP Signal name Torque monitor signal Control signal power supply Signal name Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Driver model MSD013P1E MSD011P1E Symbol IM COMGND OZ+ OZCZ CW+ CWCCW+ CCWFG A 35 45 Z phase output Z phase output Z phase output CW pulse input CW pulse

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.56 0.66 0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46 0.50 A 1.30 1.61 2.10 A 1.30 1.61 2.10 Bore Bore 075 (3/4") 106 (1 1/16") 150 (1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

MY1

Use 0.3 to 0.7 times the thrust (varies depending on the operating speed) as a guide for actual use. g: Gravitational acceleration Dynamic moment M Mounting orientation Dynamic load FE Horizontal Ceiling Wall Vertical Z 1.4 100 x a x mn x g a a 1 3 x FE x Z ME Dynamic moment Dynamic moment ME is not generated.

MGC

21.5 (29.5) A B 20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

CLQ

1 A B A' B' Without magnet Extension locking u t @5 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When shipped Section A-A' Retraction locking !0 !5 Section B-B' !3 !

SYJ300-OMU0003

SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700 M3 : 0.8N.m O 21 No.SYJ300-OMU0003 Assy SYJ72(R)(-Q)) (SYJ74(R)(-Q)) SYJ700-10-1A M3 : 0.8N.m :SYJ700-10-2A , (SYJ700-5-3) SYJ700-10-1AAss'y CE SYJ700-10-2A-1-Q SYJ700-10-2A-2Q 22 No.SYJ300-OMU0003 Assy 5 G V111 T S (DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V

VCA

Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 17-2-17 12 Series VCA Manifold Exploded View Series VCA20 Manifold body Gasket q w Manifold base A port side Mount it as shown

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

SMC

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

PSE530/200

1 High Precision, Remote Type Digital Pressure Sensor Series PSE530/200 ZSE ISE PSE Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1

C76

e r t y u i o !

C76

e r t y u i o !

Digital Flow Switch (Integrated display type) ( compatible)

sensor Symbol Model A AA PF3W704-#-#T 81 50 PF3W720-#-#T 89 54 PF3W740-#-#T 109 71 PF3W711-#-#T 135 92 PF3W704-#-#T 115 74 PF3W721-F12-#T 119 76 PF3W721-F14-#T 123 78 -103No.PF-OMW0010-D PF3W704/720/740 (With flow adjustment valve) Basic type and flow adjustment valve Symbol A AA B D F K L N P Q Q: Number of rotations Model PF3W704S 104 50 63.6 (Max. 68.6) 70.2 34 58.5 18 13.6 2.7 depth