Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Flange style (20 to 32) Be aware that the cylinder mounting bolts and the fitting could come in contact with each other in the following styles: q Front flange style with the front end lock, w Rear end flange style with the rear end lock, and e With double end lock.

2/3 Port Valve for Various

Series VXA21/22 Dimensions (Orifice Size: 3 mm, 4.5 mm, 6 mm) VXA212/VXA213/VXA223/VXA224 Bracket Pilot port Spanner spout, hexagon Model Port size P Rc A B C D E F With bracket Port size G H I J 1 8 1 4 1 4 3 8 10 VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Otherwise, the lock may not disengage. ( Refer to "Regarding lock disengagement".) e Disengage the lock before installing or adjusting the cyliner. The lock could become damaged if the cylinder is installed with its lock engaged. r Operate the cylinder at a load ratio of 50% or less.

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 8 Series VBA Construction/Replacement Parts VBA10A VBA11A q r e w t r e u q t w VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q t y r w e q VBA22A, 42A Replacement Parts/Kit No.

Multistage Ejector (N)ZL Series

P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole MULTISTAGE EJECTOR 76 52 8 27 178.5 5 4.5 Section A with digital vacuum pressure switch (40) (N)ZL212-E (ZSE4) (N)ZL212-EB (ZSE4B) (N)ZL212-EE (ZSE4E) (2) (1.6) 4-M5 x 0.8 Thread depth 6 (mounting hole) 73 87 12

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

IDX-OM-W028

IDU Series 10-1 Safety instructions 10 1 IDX-OM-W028 Air Dryer 10 Specification for Option R IDU22E75E-23 IDU22E75E-30 Customer connection side Tightening torque : M5 (2.6Nm) Connector width : 9.5mm or less Applicable electrical wire1.25mm2 or more Customer connection side Tightening torque : M5 (2.6Nm) Connector width : 9.5mm or less Applicable electrical wire1.25mm2 or more L01,L02,L03

CLK1

Step 3) Screw in the accessory unlocking bolt (hexagon socket headcap screw 32: M3 x 8l, 40: M4 x 8l, 50: M4 x 8l, 63: M5 x 10l). 1. Piping port position, switch rail position, and by-pass piping position can be selected by the part number. However, if there is an error in ordering and changes to the positions are required, please note the following. a.

AMPSeries

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

AMP

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

F 4 T 10 9 Silencer box 2(B), 4(A) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .57320

Using the VVEXB/2/4 series, a maximum 10 station manifold is possible.Electro pneumatic regulator, Step-less control through electric signals, Simple circuit configuration, Internal or external pilot available, Base mounted or body ported styles, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, MA, VY1 BASE MT .25269

VER2000/4000

6 q w e r t y u i Block packing !

Table of Contents - Tubing

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

VFM300

0 w e Valve Valve spring Return spring Spool spring Head cover r Spool valve assembly NBR ZDC !1 Stainless steel t ADC End cover Metallic plated !2 Stainless steel y POM Piston !

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.