End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

Peltier-type Chiller Thermo-con/ Compact Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine

Rotary Actuator/Vane Style Series CRB1

b (h9) h (h9) Model l W CDRB1BW 5020 0 40.030 0 40.030 P PORT CDRB1BW 6325 50.030 0 0 50.030 CDRB1BW 8036 50.030 0 0 50.030 4 x T CDRB1BW10040 0 0 70.036 70.036 S F CDRB1BW-SE, CDRB1BW-DE L E K Key length B port B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

HRX-OM-Y098

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

Nozzle Type Ionizer

p. 11 Accessories p. 12 Repair Parts p. 12 Options p. 13 Functions p. 14 Wiring p. 15 Power Supply Cable Connection Circuit p. 16 High flow rate nozzle Timing Chart p. 16 Dimensions p. 17 Related Product Intermittent Control Timer p. 20 Made to Order With Right Angles -X367 p. 21 Nozzle Variations p. 23 Female threads for piping Specific Product Precautions p. 24 Safety Instructions

Modular/F.R.L. Units Series AC

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AC30 Rc3/8 AC40 Rc1/2 AC40-06 Rc3/4 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 1000 2000 3000 00 1000 2000 3000 4000 5000 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AC50 Rc1 AC55 Rc1 AC60

Cylinder with Lock Series CNS

CNSD CD Hole H10 Shaft d9 Rc(PT) BQ Plug with breathing hole BC element M GA Rc(PT) BP GB G G FA Unlocking port 2-Rc(PT) P Cylinder port Width across flats KA MM D EA E VA AL CX CZ CT N N U A K F BN L RR S + Stroke H ZZ + Stroke Z + Stroke 2-MA Effective thread depth R CL T GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (

Rotary Actuator/Vane Style Series CRB2

/Made to Order P For details, refer to pages 69 to 80.

CEx-OML0058

I s i t p o s s i b l e f o r c a b l e o f I s t h e a n y i n f l u e n c e s t r o k e re a d i n g c y l i n d e r t o o f n o i s e ? b e w i r e d s e p a r a t e l y f r o m t h e p o w e r l i n e ? t h e p o w e r l i n e ?

PFxx-OMU0002

PF3A703H Item Default Settings [P] Set value of OUT 1500 L/min [H] Hysteresis of OUT 150 L/min PF3A706H Item Default Settings [P] Set value of OUT 3000 L/min [H] Hysteresis of OUT 300 L/min PF3A712H Item Default Settings [P] Set value of OUT 6000 L/min [H] Hysteresis of OUT 600 L/min : For hysteresis, please refer to [F 1] Setting of OUT (page 31). 22 No.PF-OMU0002-D [Hysteresis

44

Component materials have met apparatuses and containerpackages standards. ( ( 320 Stainless Steel 316 Insert Fittings KFG2 Series Variations Male Connector KFG2H Bulkhead Union KFG2E Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 KQ2 KQB2 KS KX KM KF Male Elbow KFG2L Union Elbow KFG2L Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 M H/DL L/LL KC KK KK130 DM Male Branch Tee KFG2T

DOC1001322

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Modular Type Filter Regulator Series AW

Note 9) Consult P/A for detailed dimensions and available attachments and options. Note 10) Comes with T type handle. 61 Filter Regulator AW20(K) to AW40(K) Made to Order Specifications Contact P/A for detailed dimensions, specifications, and lead times. e With Digital Pressure Switch Digital pressure switch (ISE30---L) is supplied loose for mounting on pressure gauge connection port.

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric Nil B L None With bracket With bottom bracket Inch Note 1) Accessories are shipped together.

NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

HRX-OM-W060

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

Stopper Cylinder

559-4 How to Order p. 560 Specifications p. 561 Weight p. 562 Construction p. 564 Dimensions Rod End Configuration Round Bar p. 566 Rod End Configuration Chamfered (Non-rotating Piston Rod) p. 567 Rod End Configuration Roller p. 568 Rod End Configuration Lever (Fixed Absorber Type) p. 569 Rod End Configuration Lever (Adjustable Absorber Type) p. 570 Rod End Configuration Lever (Adjustable