MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Wedge Cam Operation Provides

10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L(mm) Holding point L(mm) MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Holding force (N) Holding force

Wedge Cam Operation Gripper Series MHK2

30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Modular Type Regulator Series AR

How to Order AR 30 BE F 1N 03 Optional specifications Regulator Symbol 1 N R Y Z Description 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Upward handle Name plate and pressure gauge in imperial units (PSI, F) Applicable model AR10 to 60 AR10 to 60 AR10 to 60 AR10 to 60 AR10 to 60 Note 2) Body size 10 20 25 30 40 50 60 Thread type AR20 Note 3) When more than one specification

CL

Calculation: (Example) CLJ2L16-60 Basic weight320 (16) Additional weight6.5/15 stroke Cylinder stroke60 stroke 320 + 6.5/15 x 60 + 27 = 373 g 4 4.4 5 3 2 1 Stopping Accuracy (Not including tolerance of control system.)

IDG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 60 0.5 MPa 0.7 MPa 0.9 MPa 0.5 MPa 0.7 MPa 0.9 MPa 50 0.3 MPa 0.3 MPa Atmosp heric pressure Atmospheric pressure 0.1 MPa 0.1 MPa 40 30 Pressure dew point ( C) 20 10 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14

MY1

Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) Y Load factor 2 = M3/M3max = 1.89/60 = 0.03 MTS m4 M3 MY 5.

energy saving effect

Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability 0.1C Temp. stability 0.1C Piping conversion

Series IDG

60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min

Rotary Actuator

Applicable shaft type: K X = X = X = Y = W2 = L2 = L4 = Y = [mm] [mm] [mm] Size Y W2 L2max L4max 30 8.5 to 25 1 to 2 Y-2 L2-2 50 10 to 36 1 to 5.5 Y L2-2 63 11 to 41 1 to 6.5 Y L2-2 80 13.5 to 50 1 to 8 Y L2-3 100 17 to 60 1.5 to 10.5 Y L2-4 Size X 30 3 to 25 50 3.5 to 36 63 3.5 to 41 80 4 to 50 100 5 to 60 Size Y 30 3 to 25 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A53 Note) Except

Refrigerated Air Dryer

page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

CS1

40 35 to 1200 3/4 M18 X 1.5 M40 X 1.5 39 2 41 26 204 162 18.5 20 111 236 115 60 48 17 63 45 70 59 45 30 to 1200 Lube Non-lube 3/4 1 M20 X 1.5 M45 X 1.5 2 39 26 46 226 182 18.5 20 111 265 115 63 60 50 74 48 17 59 45 30 to 1200 M24 X 1.5 M56 X 2 3 30 49 277 225 25 56 141 335 23 140 20 71 67 60 86 60 69 56 30 to 1200 1 M30 X 1.5 M64 X 2 4 49 36 65 330 270 23 30 146 400 140 20 76 60 80 70 96

Modular Type Air Filter Series AF

to left AF30 to 60 F Note 2) R Z Note 6) AF20 to 60 Note 1) Drain guide is NPT1/4 (applicable to AC30 to 60) Note 2) Drain guide is G1/4 (applicable to AF30 to 60).

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS3000 Rc 1 4 VZS With surge voltage suppressor (FS) Single Double 3 position (Closed center) Page VFS (Standard) 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 24 VDC 3-7-23 3 position closed center VS4 2.4 2.4 VQ7 (Option) 24 VAC, 50/60 Hz 48 VAC, 50/60 Hz 110

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

32 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Max.157 70 110 50 7 30 10 60 25 26 13.5 10 Max.157 130 70 Clevis pivot bracket (E) l3 l1 K2 (Max.) l3 (Max.)

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D