Compact Vacuum Ejector Series ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Ejector Valve Unit, Series ZYY/ZYX

Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

AC Servo Motor Driver (CC-Link Type)

JOG operation positioning operation programmed operation DO forced (Note 4) 0 0. b output single-step feed (Note 4) Test operation mode # #. d (Note 1) Motor-less operation # #.

AC Servo Motor Driver (CC-Link Type)

JOG operation positioning operation programmed operation DO forced (Note 4) 0 0. b output single-step feed (Note 4) Test operation mode # #. d (Note 1) Motor-less operation # #.

VFR2000-OMM0001

U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

VFR3000-OMJ0001

01C COM A B 1)8 2) +COM -COM 3) D U D 1 COM A B 1)8 2) +COM -COM 3)D U D 1 11 VFR3000-OMJ0001-A () X () [3(EB) 4(EA)] ( (PE) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR3000-OMJ0001-A Revision history A Renewal Qo 1st printing:JX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362

The C(D)V1 series was discontinued in April 2005, and the C(D)VM5 series was changed. Foot (“L”), clevis (“C”), and trunnion (“T”) mounting type C(D)V1 series cylinders are not interchangeable with standard C(D)VM5 series cylinders.
If interchangeability with a C(D)V1 series cylinder is required for replacement, suffix “-X339” to the C(D)VM5 series cylinder part number.

Note) The following auto switches are reed auto switches without an indicator light (only the reed switch is built in): D-A67 (L), D-A80 (L), D-A80H (L), D-A90 (L), D-A90V (L), D-C80 (L), D-E80A (L), and D-Z80 (L).

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

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Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double

VCB

Printed in Japan. 1st printing June, 2000 D-SMC.L.A. P-80 (D)

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Ejector Valve Unit Series ZYY/ZYX 1

Number of ejectors 1 to 10 Ejector mounting position U D U side D side [Example: When individual wiring type model 45 for SY3000 is selected] ZZY Y3-45-04D-C6J1U 1SET Note 1) The combined total of solenoid valve and ejector valve stations is a maximum of 20 stations. (Example: When there are 12 solenoid valve stations, there are 8 ejector stations.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E--Bracket dimensions----INA-11-4041 4, 3 8, 1 28017015

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D EFG H JK--INA-11-4053/48518020

Air Preparation Equipment

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS