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Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double

VCB

Printed in Japan. 1st printing June, 2000 D-SMC.L.A. P-80 (D)

ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Ejector Valve Unit Series ZYY/ZYX 1

Number of ejectors 1 to 10 Ejector mounting position U D U side D side [Example: When individual wiring type model 45 for SY3000 is selected] ZZY Y3-45-04D-C6J1U 1SET Note 1) The combined total of solenoid valve and ejector valve stations is a maximum of 20 stations. (Example: When there are 12 solenoid valve stations, there are 8 ejector stations.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E--Bracket dimensions----INA-11-4041 4, 3 8, 1 28017015

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D EFG H JK--INA-11-4053/48518020

Air Preparation Equipment

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Actuator Position Sensor D-MP Series

Lead Wire Specications Model D-MP Sheath Outside diameter [mm] 2.6 Insulator Number of cores 4 (Brown/Blue/Black/White) Outside diameter [mm] 0.57 Conductor Effective area [mm2] 0.08 Minimum bending radius [mm] (Reference values) 13 Weight [g] Model D-MP025 D-MP050 D-MP100 D-MP200 Lead wire length 2 m (A) 29 31 37 51 0.3 m (B) 17 19 25 39 0.3 m (C) 25 27 33 47 How to Order D MP 025 A Measuring

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Steam Valve

Symbol Graph (1) VND 02 D Pilot Pressure (N.O. type) Valve type Valve size N.C. N.O.

Slit Valve

voltage drop 2.4 V or less (to 20 mA) / 3 V or less (40 mA) F: D-sub connector (9P) Indicator light Red light emitting diode (LED) lights up when ON.

•

ISE6B Z$E6B ZSE6BIZSE6BISE6B.1 'SE6B Item D -27L I El-67L D -26L D -27L ~67L 8-26L Multiple display units Free selection of display units and ease of Unit conversion make these switches adaptable for any global user.

IDUS/IDFS

Series IDFS IDFS6E/8E/11E Evaporation thermometer G H Illumination switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M A B Model IDFS6E IDFS8E Port size J C D M F

S Couplers

flats Min. bore size Model T Connection port size Weight g Effective area mm2 L D KKA3S-01F-1 Rc 1/8 44.5 37.6 T 17 -02F-1 1/8 Rc 1/4 18.5 6.1 23.4 44.8 41.2 -03F-1 Rc 3/8 49.9 43.1 19 D KKA4S-02F-1 Rc 1/4 46.1 92.2 22 -03F-1 1/4 Rc 3/8 24.2 8.1 41.2 46.9 86.2 -04F-1 Rc 1/2 52.3 99.4 24 H KKA6S-03F-1 Rc 3/8 178.8 50.5 L -04F-1 1/2 Rc 1/2 30.7 11.4 81.6 56.2 191.2 30 -06F-1 Rc 3/4 169.8 57.9

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

EX500-GEN2_eng

Branch port C (COM A) 6 Max. 16 devices (Input unit: Max. 2 devices/Output unit: Max. 2 devices per branch) Slave connection nember 7 Branch port D (COM D) 20 m or less total extension per branch Branch cable length Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result.