5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side ported , Available with external pilot , One-touch fittings SS5Y3 10 STA MANIFOLD BASE. 4/5 PORT SOLENOID VALVE. 0.00000 lb. SY.

Model: 10T (Side-Ported), Type: None, Valve Stations: 6 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 16 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L3 (9 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 3 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10M (Side-Ported), Valve Stations: 6 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L3 (9 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 4 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10M (Side-Ported), Valve Stations: 4 Stations, P, E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10T (Side-Ported), Type: None, Valve Stations: 4 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10T (Side-Ported), Type: None, Valve Stations: 8 Stations, P,E Port Location: D Side, SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10T (Side-Ported), Type: None, Valve Stations: 8 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L3 (9 Cores), Lead Wire Length: 3 (3m), Valve Stations: 4 Stations, P, E Port Locations: D (D Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10M (Side-Ported), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10M (Side-Ported), Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10M (Side-Ported), Valve Stations: 8 Stations, P, E Port Location: D Side, SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: A3N (Negative Common, 32 Outputs), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 3 Stations, P, E Port Locations: D (D Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting)