ZSE30A(F)/ISE30A

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min. B Released Work 1 Work 2 Work n D Peak/Bottom value indication Atmosphere This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

IZx-OMR0035

Filter holder C D B A A B Filter Filter holder Hooks 27 Doc. No.: IZ-OMR0035 5. Performance Performance data shown in this chapter is based on an electrified plate (dimensions: 150 x 150 mm, electrostatic capacity: 20pF) defined by ANSI standard (ANSI/ESD STM3.1-2006).

Cylinder with Turntable Series MGT

D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Proper Mounting Position (mm) A B A 15 19.5 24.5 B A 14 18.5 23.5 B Bore size 63 80 100 a b 14 18 17 c 20 24 23 d Auto switch model 15 18 22.5 19 23.5 28.5 11 14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

K35-OMW0030

Disassembly of the rod boot (1) Loosen the mounting screw for rod boot mounting band A and B. (2) Remove the rod boot. 8-7-2. Assembly of the rod boot Rod boot Mounting band B Mounting band A (1) Mount the rod boot to the cylinder. (2) Tighten the screw for the rod boot mounting band A and B.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

VFR6000 Series

B side 3 COM (1) Ground Position Model Left Center Right (1) (3) VFR610 A side COM (2) VFR620 A side COM B side 3 VFR640 5 A side COM B side Can be used as either +COM or -COM. Applicable terminal: 1.25-41.25-4M A side terminal block B side terminal block A side B side 8 VFR6000-OMA0001-B VFR6000 Series Specific Product Precautions 2 Be sure to read before handling.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

MX-OMP0051

A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda,

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

(mm) Fitting size D 3.2 4 Weight (g) A B (1) B (2) C E F M Model M-32R-2 M-04R-2 36 36.5 23.3 23.8 20.5 20.5 31.5 32 0.9 0.7 0.8 2 / 1.2 2.5 4 Note 1) Dimensions when connected to the M5 and M6 connection threads for KJ series and KQ series. Note 2) Dimensions when connected to KQ series.

Power Valve Precision Regulator

B 2 Valve body size VEXB-2P VEX1-9-1 P Port size Port size M5 1/8 Thread type Port size Thread type Rc G Note) Thread type Symbol A B Symbol Nil F N T Symbol Nil F N T Symbol A B Thread type Rc G Note) Sub-plate Port size 1/8 1/4 NPT NPTF NPT NPTF VEXB-4 Seal material VEX1-11-2 Base gasket Symbol Nil B Seal material NBR seals FKM seals Note) Not conforming to ISO1179-1. 844 VEX13 Series 0

Thermo-con

Communication A B RS-485 RS-232C Select B when communication is not used. Specifications (For details, please consult our Product Specifications information.)

PSxx-OMU0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

Cylinder with lock

1 34 FLAT WASHER (8) In case of 80,100 13 HEXAGON SOCKET CAP BOLT 4 35 BUMPER A 1 14 HEXAGON SOCKET CAP BOLT 2 36 BUMPER B 1 15 WEAR RING A 2 37 WEAR RING B 1 16 PISTON SEAL A 1 38 ROD END NUT 1 17 ROD SEAL A 1 39 MAGNET (1) In case of CP96ND* 18 GASKET 1 40 ROD SEAL B 1 19 ELEMENT 1 41 PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.