smcmaintenancepartslist

Content and quantity Clamp arm Cotter pin Applicable hole diameter For 13 hole For 15 hole For 16 hole For 18 hole For 20 hole For 25 hole For 30 hole CKQG-13A CKQG-15A CKQG-16A CKQG-18A CKQG-20A CKQG-25A CKQG-30A 1 1 1 1 1 1 1 1 1 1 1 1 1 1 For 20 hole (Round/With Shim) 183 Pin Clamp Cylinder/Compact Cylinder Type Series CKQG32 Construction CKQG32-100RH-X2082 e Tube gasket w Rod seal q Piston

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (accessory) K H OUT Pressure gauge port size Square embedded type pressure gauge (accessory) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D AC30A, 40A A N F E P K C G G OUT IN B Pressure gauge (accessory) K OUT Pressure gauge port size J L Square embedded type pressure

High Purity Fluoropolymer

No. 1 1 2 2 3 3 3 4 4 5 5 6 6 Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (Option

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

V100

VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A

VP3145/3165/3185

VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VPA4

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VP4

Conduit terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A

VQ5000

sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ i VQD VQD1000-9-1H AXT632-7-13 (M1.7 x 18) o w Note) Body cannot be disassembled. 3(R) 4(A) 1(P) 2(B) 1(P) Valve Single Unit Option Piping plate assembly VQD1000-20A Manifold type (VQD1131) can be changed to single unit type (VQD1121) by mounting

VQZ1000/2000/3000

VQC SQ VQ0 Throttle valve spacer (For VQZ2000 only) VVQZ2000-20A-5 VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mount a throttle valve spacer between manifold base and valve, and thus making it possible to control cylinder speed by meter-out.

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: P (110VAC, Conduit Terminal w/Surge Voltage Suppressor)

Size/Valve Type: 5 (Size: 20A; Valve Type: N.C.), Body/Port/Orifice: M (Body Material: Stainless Steel; Port Size: 3/4, Orifice Dia.: 20), Voltage/Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: H (Low Concentration Ozone Resistant, FKM Seal, Oil-free, Rc Thread)

N.C.Max.operating pressure differential (MPa)Flow characteristicsMax.system pressure (MPa)Note 2) Mass (kg) Av x 10-6(m2)Cv convertedVCL441/4 ( 8A)3/8 (10A)1/2 (15A)3/4 (20A)32.08.40.352.01/4 : 0.583/8 : 0.551/2 : 0.623/4 : 0.78

N.C.Max.operating pressure differential (MPa)Flow characteristicsMax.system pressure (MPa)Note 2) Mass (kg) Av x 10-6(m2)Cv convertedVCL441/4 ( 8A)3/8 (10A)1/2 (15A)3/4 (20A)32.08.40.352.01/4 : 0.583/8 : 0.551/2 : 0.623/4 : 0.78

N.C.Max.operating pressure differential (MPa)Flow characteristicsMax.system pressure (MPa)Note 2) Mass (kg) Av x 10-6(m2)Cv convertedVCL441/4 ( 8A)3/8 (10A)1/2 (15A)3/4 (20A)32.08.40.352.01/4 : 0.583/8 : 0.551/2 : 0.623/4 : 0.78

N.C.Max.operating pressure differential (MPa)Flow characteristicsMax.system pressure (MPa)Note 2) Mass (kg) Av x 10-6(m2)Cv convertedVCL441/4 ( 8A)3/8 (10A)1/2 (15A)3/4 (20A)32.08.40.352.01/4 : 0.583/8 : 0.551/2 : 0.623/4 : 0.78