5 Port Solenoid Valve Series SY3000/5000/7000/9000

pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 300 400 500 600 700 0 300 400 500 600 700 0 100 200 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBY7000 A1 port regulated (PA), B1 port regulated (PB) P port regulated (PA, B) Outlet pressure (MPa) Outlet pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 200 400 600 800 1400 1000 1200 0 200 400 600 800 1000

E-P HYREG

1 2 3 4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300/1301 1 1 1 0.9

Series AK1000

2P 3P 4P 4PL 5PC No code VS PK TF V3 1 2 10 40 -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.

EXxx-OMQ0015CN

1 0 0 4 PLC : 032767 +0 +32767 PLC : 3276865535 -0 -32767 : 15 V 50001000 4VPLC 4000 -50No.EX-OMQ0015CN (1) [H.T.]

Air Cylinder CP Series Cylinder Positioner Assembly

7 9 t20\ 1.57 440) 0.39 1 1 0 ) 0.67 i17J d 1 0 !

Wedge Cam Operation Gripper Series MHK2

Scale: 37% (mm) 9 2-M3 X 0.5 thread 4 deep 15 3H9 3 deep +0.030 0 2-M3 X 0.5 thread 6 deep 13H9 1.5 deep +0.043 0 4-M4 X 0.7 thread 8 deep Bottom hole dia. 3.4 through-hole 0 -0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 deep +0.030 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Attachment mounting thread) M3 X 0.5 (Finger closing

CNA

72.5 31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5 50 50 9.5 86.5 2 10.5 0 78 35 4 2 8.5 77 0 0.5 11.5 1.5 43.5 78.5 77 42.5 0 0 86 3.5 42 49 63 63 13 93.5 4.5 13 2 85 42 6.5 5.5 12 91 1.5 3 14 5 50.5 85.5 91 48 2.5 3.5 93 6 50 55.5 80 80 15.5 102 8 16.5 4.5 93.5 50 10 8 14.5 107 4 6.5 17.5 7.5 59 94 107 54 6 6 101.5 9.5 57.5 63 100 100 18 112 9.5 18 7 104 57.5 11.5 10.5

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

MHF2

9 Mounting screw 12-3-11 12 Series MHF2 Dimensions MHF2-8D 2.5H9 +0.025 0 depth 2.5 16 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3 28.3 3.4 36 32 2-M3 x 0.5 thread depth 4 15.8 22 Mounting thread 5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use

MHF2

MHT E MHY 13 25 25 30 MHW 41 MRHQ E 4-5.2 through (Mounting hole) 0 -0.1 Misc. 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread

SMC Electronic Switch Series Variations

range 12 to 24V DC (Ripple 10% or less) Voltage 3% F.S.or less (0 to 60C) 3% F.S.or less (0 to 60C) 3% F.S.or less (0 to 60C) 10 m (0 to 60C) 3% F.S.or less (5 to 40C) 3% F.S. or less (5 to 40C) Temperature characteristics 5% F.S. or less (0 to 60C) 5% F.S. or less (0 to 60C) Repeatability 1% F.S. or less Variable 1 to 10% Fixed 4% F.S.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

HRX-OM-M090

HRS018-W-0 HRS024-W-20) HRS Series 9.3 Flow Chart 9-7 HRX-OM-M090 Chapter 9 Documents 9.4 Cooling capacity 9.4.1 HRS012--10-(BJMT) 2500 2500 Ambient Ambient temperature temperature 2000 2000 or or Cooling capacity[W] Cooling capacity[W] facility water facility water temperature temperature 1500 1500 25 32 40 25 32 40 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

DOC1003626

(Example 1) The least significant bit was a 1. 0 0 0 0 0 0 0 1 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top Not execute ExOR 3.10 Checksum calculation method HRS400-A-46 3-10 DOC1003626 Chapter 3 Serial communication

JXCx-OMT0032CN

3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 40 - 13.

10

0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16 12 12 12.5 12.5 17.5 17.5

Series VQ Base Mounted Metal Seal/Rubber Seal

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

MXQ

0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Thermo-chiller/Rack Mount Type

0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.