With Factory Installed

-k~-+---F'-i a. ~ " Ci Ora e mark ~ 8 0.2i=--l-t--':=-I:---+-f>__j ~ 8 0. 15 % ~-2~ 0 ~ 0-~ 4~ 00 ~-~ 6~ 00 ~-~ 80 ~0-~ 1 ~ 00 ~ O --j 0 'Ji 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Flow rale / min (ANR ) Inlel pressure MPa 8Turning the adjusting handle clockwise increases the pressure and turning the handle counterclockwise reduces the pressu re. AR2501-03 AR2501-03 0 I !

HRX-OM-W032

Set temperature 40.0 oC (104.0 oF) (-)2 5.0 to 55.0 oC (41.0 to 131.0 oF) Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3.

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

10

0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 80 80 0.5 MPa 0.5 MPa 120 120 0.5 MPa 0.5 MPa 60 60 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 80 80 40 40 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 40 40 20 20 0 0 20 40 60 80 100 120140 0 0 40 80 120 160 0 0 40 80 120 160 0 0 20 40 60 80 100 120140 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

0 0 0 0 0 10 20 5 10 5 10 ASF Number of needle rotations Number of needle rotations Number of needle rotations 15-9-65 10 Series AS-FM Construction Component Parts No.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No.

MNB

+0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 11 Series MDNB Auto Switch Specifications Applicable

EX250-SDN1(-X102)_eng

SW1-1 SW1-2 SW1-3 SW1-4 SW1-5 SW1-6 MAC ID 21 (2) 22 (4) 23 (8) 24 (16) 25 (32) 20 (1) Caution 0 1 2 0 0 0 0 0 0 Communication connector Outline Dimensions 0 1 1 0 0 0 0 0 0 0 0 0 M12 5-pin plug A-code After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Compact manifold regulator ARM5 Series

0 50 100 150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.0-33 to 0-36 for Safety lnstructions and common precautions. Caution Warning How to Use L and M Plug Connector Manual Override Without an electric signal for the solenoid valve the manual override is used for switching the main valve.

3

0 !1 !2 q w e r t y !1 !0 o i u Component Parts No.

Power Clamp Cylinder

0 5 10 15 20 0 450 400 350 300 250 200 150 100 50 0 Arm length L (mm) Arm length L (in) Allowable load for clamp arm end Refer to the graph on pages 190 and 191 for parts weight of the arm.

Slider Type/Ball Bushing Bearing

Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

+0.025 6 -0.1 0 7h9 -0.036 0 2.6 4 18 13 15 M3 x 0.5 7 4 6 (Effective depth 3) 8 -0.1 0 10h9 -0.036 0 2.5H9 0 +0.025 21 26 19 M3 x 0.5 9.5 4.5 23 3.3 5 18 10 (Effective depth 4) 13h9 -0.043 0 11 -0.1 0 4H9 0 +0.030 28.5 29.5 35 M5 x 0.8 25.5 5.1 7 12.5 6.5 25 15 (Effective depth 7) 17 (Effective depth 8.5) 17h9 -0.043 0 15 -0.1 0 41 41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052

CS1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

MK

Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.