Digital Flow Switch

to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard) Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C)

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Mounting dimensions of extension fitting One-touch Fittings (KQ2H/KQ2S/KQ2L/KQ2W/KJH/KJS/KJL/KJW) Auto switch model D-M9(V) D-M9W(V) D-F8 D-M9A(V) 5.9 S 10 O Width across flats 5 12 19.5 Interference between the auto switch and the fitting When mounting extension fittings, first, tighten it by hand, then give it an additional 1/4 turn with a wrench. 924 Air Gripper MHZ2 1122Dimensions L

MGP-OM0242Q

Part number of auto switch mounting bracket D-M9 Applicable auto switches D-M9W D-A9 Bore(mm) 12 to 63 Surface with auto switch mounting slot Auto switch mounting surfaces Mounting of auto switch Tightening torque Auto switch Mounting Screw (Nm) Auto switch model Tightening torque D-M9 D-M9W 0.05 to 0.15 D-A9 0.10 to 0.20 NoteAuto switch mounting brackets and auto switches are enclosed with

Suction Guard (Produced upon receipt of order) FHG Series

Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Power Valve: Economy Valve Series VEX5

h Grommet terminal i Conduit terminal j DIN terminal a Model b d e f VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 2449.

VXD21/22/23

Model Power source Frequency (Hz) 50 20 (32) 11 60 17 (28) 7 50 40 18 60 35 12 50 50 21 60 45 17 AC VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D,

IIIIIII

1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

Mechanical Valves Series NVM, NVFM, NVZNI

1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22

CEx-OMG0106

Selection of Dip Switch 53 Chapter 12: Driving 12-1. Setting of Origin Direction 54 12-2. Adjustment of Air Balance 54 Chapter 13: Error Messages & Countermeasures 13-1. Controller 5557 13-2. Brake Units Life Span 58 Chapter 14: Appendix 14-1.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

KB

D L A2 A1 M Part No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-78 5 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d AS A L4 ASP D1 ASN L3 AQ ASV AK M1 ASS D2 T L1 ASR L2 ASF Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1

ZCUK

Applicable auto switch Number of auto switches D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

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SOmA Nil Relay, Sequence controller D-660 l00VAC Max.2SmA 200VAC Max. 12.SmA Model Load voltage Max. current or conduit range Indicator light Application D-A31 1 00VAC 2SmA Relay, Sequence controller 200VAC 12.SmA D-A37 24VOC S-30mA D-A39 24VDC 10-60mA Sequence controller DIN connector type D-A4 type Relay, Sequence controller Model Load voltage Max. current or conduit range Indicator

MXH Series Compact Slide

D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

EXxx-OMN0035CN

DM E D-sub (25 ) 8 8 F (32 ) 8 8 P PNP N NPN EX600-DME No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () -46No.EX-OMN0035CN-A EX600-DMF No. 1 LED 2 () 3 4 5 () -47No.EX-OMN0035CN-A (1)EX600-DME EX600-DMPE EX600-DMNE 1 0 2 1 3 2 4 3 5 4 6 5 7 6 8 7 9 24 V() 10 24 V() 11 0 V() 12 0 V() 13 FE 14 0 15 1 16 2 17 3 18 4 19 5 20 6 21 7 22 0 V() 24 V() 23 0 V() 24 V() 24 0 V()

240

Note 5) The direction of rod end width across flats (12) differs depending on the products.

VHK

D.