5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

KJ

1 8 10.4 10 18 16 3 5 32 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 Connection thread 1 2 3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

HRX-OM-X037

HRL Series 3.3 Installation 3-41 HRX-OM-X037 Chapter 3 Transport and Setting Up Recommended piping circuit User's equipment Thermo-chiller 1 2 2 Circulating fluid outlet for CH2 Optical 2 2 systems Circulating fluid return port CH2 1 4 4 Circulating fluid outlet CH1 for Laser 4 4 source Circulating fluid return port CH1 3 For water-cooled type 5 4 6 Facility water inlet Facility 4 5 water

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

LJ1H

. 2-8H10 depth 8 4-M8 x 1.25 thread depth 10 160 20 80 LJ1 LG1 LC1 LX LC6D/LC6C Switches Rc 1/4 Vacuum suction port 100 217 (252) Work piece mounting reference plane Rc 1/4 Vacuum suction port 110 126 Cable entry 199.5 (234.5) 49.5 Stroke + 144 (table movement range) 68 105 120 68 44 Stroke + 393 (428) 2-T-slot 1 170 110 76 2-T-slot 2 Body mounting reference plane 8-M10 x 1.5 thread depth

ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

CQ2

With auto switch Standard CQP2B12Add #4 to SCQP212, #2 CQP2B16Add #4 to SCQP216, #2 CQP2B20Add #4 to SCQP220, #2 CQP2B25Add #4 to SCQP225, #2 With auto switch Standard CQP2B32Add #4 to SCQP230, #2 CQP2B40Add #4 to SCQP240, #2 CQP2B50Add #4 to SCQP250, #2 2.3-97 Series CQP2 12 to 50 Spring Extend Without Auto Switch 12 to 25 Rod end male thread Rod end male thread (mm) X L1 Bore (mm) H1 C1

15

(Recommended height 5 mm) LEC Y Motorless Motorless Dimensions [mm] Stroke L A B n D E 50 238 56 180 4 100 288 106 230 4 150 338 156 280 4 200 388 206 330 6 2 300 250 438 256 380 6 2 300 300 488 306 430 6 2 300 350 538 356 480 8 3 450 400 588 406 530 8 3 450 450 638 456 580 8 3 450 500 688 506 630 10 4 600 550 738 556 680 10 4 600 600 788 606 730 10 4 600 650 838 656 780 12 5 750 700

HRX-OM-S004

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker] . 4-2 4.2.3 For HRS100/150-**-20-B1,HRS100/150-**-40/46 . 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

ZP

to 8 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 4 Nylon tube 4 Urethane tube 4 tube 6 tube Applicable tube dia.

F

-2 TFU 0805B-3 Number of Tubes 2 3 2 3 2 3 TFU B Tube OD (mm) 4 6 8 Tube ID (mm) 2.5 4 5 OD/ID Flow Factor Cv/Metersote 3) 0.11 0.39 0.70 04254mm OD 2.5mm ID 06046mm OD 4mm ID 08058mm OD 5mm ID Max Operating Pressure 0.8MPaNote 2) / 120PSI Operating Temperature -20~+60C / 4~140F N U M B E R O F T U B E S Material Polyurethane 2 2 3 3 Color Black Note 1)Min Bending Radius (mm) 10 15 20 Tube

CXWM/CXWL

2, !3, !4, !5.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.