Bore sizes: 6, 10, 15, 20, 25, 32 mm; Non-rotating accuracy: ± 0.1°; 10- exhaust relief; 11- vacuum relief; 12- exhaust relief (available only in L, ball bushing bearing); 21- exhaust relief (available only in L, ball bushing bearing); 22- vacuum relief (available only in L, ball bushing bearing); PTFE grease used in Clean Room Series; Lithium grease used in Copper, Fluorine, Silicone-free

The 11/22-MXP clean room, high precision slide tables have travelling parallelism of 0.004 mm for all its bore sizes and non-rotating accuracy +/-0.03° for 6 and 10 mm bore sizes and non-rotating accuracy +/-0.04° for 12 and 16 mm bore sizes.

Safety Instructions

Also, in order to use it under the optimum state, conduct a regular inspection once a half year. 17-6-10

None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y7BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y7PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 32mm, Port Type: TN (NPT: 25 & 32mm Bore), Stroke: 10mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: 11 (Clean Type, Vacuum Suction), Bore Size: Ø10, Stroke: 10mm, Adjuster: Rubber Stopper, Magnet: W/Magnet and Rail, Auto Switch: M9N (Solid State, Gen. Purpose, 3 Wire NPN, Horizontal), Lead Wire: M (1m)

Specification: 11 (Clean Type, Vacuum Suction), Bore Size: Ø10, Stroke: 10mm, Adjuster: Rubber Stopper, Magnet: W/Magnet and Rail, Auto Switch: M9PW (Solid State, 2-color Indication, 3 Wire PNP, Horizontal), Lead Wire: M (1m)

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: 11 (Clean Series, Vacuum Suction), Bearing: M (Slide Bearing), Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Type: Rail, Type: DIN Rail for SV1000 / 2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 223 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Rail, Type: DIN Rail for SV3000 / 4000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 223 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m, M8-3 Pin, Number: -