Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Mounted Type External Filot Type i trri--] .ZDI \ B .* ^N-_l ffiv J :FTT E \ I B N.O. N.C. I I nerer to pase@ I I I I I 4,5 Port Solenoid Pilot Operated Base Mounted Type(4 Port) Series:NVJ3OOO Port(Manifold only) ^-! + 4l/-\lF 4t/-t-\lF .

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Mounted Type External Filot Type i trri--] .ZDI \ B .* ^N-_l ffiv J :FTT E \ I B N.O. N.C. I I nerer to pase@ I I I I I 4,5 Port Solenoid Pilot Operated Base Mounted Type(4 Port) Series:NVJ3OOO Port(Manifold only) ^-! + 4l/-\lF 4t/-t-\lF .

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Mounted Type External Filot Type i trri--] .ZDI \ B .* ^N-_l ffiv J :FTT E \ I B N.O. N.C. I I nerer to pase@ I I I I I 4,5 Port Solenoid Pilot Operated Base Mounted Type(4 Port) Series:NVJ3OOO Port(Manifold only) ^-! + 4l/-\lF 4t/-t-\lF .

Series MXP Precision Air Slide Table

Contents 6 2 pieces each of No.12 and 13 MXPJ6-PS 166 166 Precision Air Slide Table Series MXP Dimensions 6 MXPJ6 Scale:100% 4-M30.5, 3 deep 7 5 H 3 D B 18 10.05 3.5 16.5 14 13 20 6 6 F 6 5 2-M40.7 Bottom hole diameter 3.3 Piping port 13.5 2-M30.5 170.05 (Plug:M-3P) Base side for mounting B D M 1 Stroke : S 5 J Z 2.4 Piping port 2-M30.5 (mm) Model F H J M S Z MXPJ65 25 38 27 37 5 44 MXPJ6

LEY-OM007

b. c.

IDU/IDF

B 220V Dryer Capacity Model A Part No.

MHL2

50 70 Note 1) J dimension is at fully closed.

Environment

Y PA Vent hole Note 5) H thread depth C Rod operating range Note 1) PB G OA FV EV J PC [2] 2 Origin Note 2) [Stroke end] Stroke end Note 3) [Origin] M D K Note 4) A + Stroke W B + Stroke Stroke L U 4 x O1 thread depth R FH EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Size Stroke range [mm] A B C D EH EV FH FV G H J K L Without

•

167.0 OUT 31.2 93.5 63 20 IN How To Order J With Magnetic Field Resistant Auto Switch ~ ~ : ; CKS1 , "~" L-3m Type of auto switch Z-5m No mark-No auto switch (With blanking plug) PH1-D-PH1 Clevis width .-J A-16.5mm B-19.5mm PH~D-PH9 Note) If the switch number is written, then the switch actuating rod assem bly is included.

MRHQ

4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A Side B 12-11-15 16 Series MRHQ Dimensions MRHQ25 A 70 58 B 93 4-M6 x 1 depth 10 47 64 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0 -0.074

15

flange to the housing B using motor flange fixing screws (included parts).

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Vacuum Pad

across flats 19 5 5 50 5 5 50 B A 6 B A M14 x 1 M14 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 6 4 4 M8 x 1.25 M8 x 1.25 K: Non-rotating D-D J: Rotating D-D Dimensions Dimensions Part no.

ZPT/ZPX

63.5 85.5 160.5 211.5 27.5 75-B01-A18 75-B01-A18 183.5 234.5 196.5 247.5 ZPX HBJ-B01-A22 (Male thread) 100 125 Hexagon width across flats 17 M22 x 1.5 9.5 50 Hexagon width across flats 30 Width across flats 19 Rc 1/8 9.5 10 Hexagon width across flats 21 J Width across flats 60 70 4-M5 x 0.8 I 11 H G F E Y 4 40 C A B D Dimensions (mm) Model B A C D E F G H I J Y ZPX100HBJ25-B01-A22 141.5

Compact Cylinder

+ Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5 3.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

LH 0.2 C B W W D E d d D E LY MM MM 4-LD Width across flats G Width across flats G LT LT NA NA Y X Y X LX B S + Stroke LS + Stroke ZZ + 2 strokes (mm) Bore size (mm) LD LH LS LT LX LY A a B B C d E F G GA J K M MA MM NA D H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 9 47 168 8 44 77 23 10 60 60 44 18 45

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

CG5-S

B 100 31.8 29.3 27.8 69.9 10.7 3/4-16 208.9 80 and 100mm-X165US are a future release.