Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, AIR, INSTRUMENTATION, IF/PFA FLOW SWITCH, 2X, IF/PFA NO SIZE ALL OTHERS, .47767 lb, ModelApplicable flow rate sensorFlow rate measurement

Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, AIR, INSTRUMENTATION, IF/PFA FLOW SWITCH, 2X, IF/PFA NO SIZE ALL OTHERS, .50677 lb, ModelApplicable flow rate sensorFlow rate measurement

Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, AIR, INSTRUMENTATION, IF/PFA FLOW SWITCH, 2X, IF/PFA NO SIZE ALL OTHERS, .41226 lb, ModelApplicable flow rate sensorFlow rate measurement

Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, AIR, INSTRUMENTATION, IF/PFA FLOW SWITCH, 2X, IF/PFA NO SIZE ALL OTHERS, .16314 lb, ModelApplicable flow rate sensorFlow rate measurement

Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, AIR, INSTRUMENTATION, IF/PFA FLOW SWITCH, 2X, IF/PFA NO SIZE ALL OTHERS, .16314 lb, ModelApplicable flow rate sensorFlow rate measurement

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Tightening of M5 Thread Use of Tube with Hose Nipple Caution Caution 1. Tighten by hand, and give it an additional rotation with a wrench. Please check the number of tightening revolutions using the table below.

CJ1

Spring Piston seal Mounting nut Rod end nut CM2 C85 CG1 Black zinc chromate Electroless nickel plated MB Dimentions: Basic style C95 Bore size: 2.5/CJ1B2-lSU4 CA1 CS1 Symbol S Z 5 16.5 10 25.5 5 29 10 38 Bore (mm) Stroke 2.5 Bore size: 4/CJ1B4-lSU4 Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore (mm) Stroke 4 1.1-5 World Wide QS\E Support...

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

ARJ1020F

Spring 134313 o AWM Dimensions AWD K A Model ARJ1020F-M5-04 ARJ1020F-M5-06 21 22 B 10.4 12.8 C 4 6 D E F 10.6 (Width across flats: 10) G H J Caution 17.2 M5 X 0.8 6 3.5 15.5 50 ITV qRelease the lock to adjust the pressure. After the adjustment, engage the lock. Failure to observe this procedure could damage the handle or cause the secondary pressure to fluctuate.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

series CU cylinder. 1 in 25.4mm Uses new type miniature auto switches (6, 8, 10) Space saving design mounts to the same surface as fittings Solid state switch D-F8 Two auto switches mountable even for minimum 4mm stroke CDUJB6-4D-F8N With centering location (for easy centering) Short pitch mounting possible Mountable from 4 directions Free-mount type Pitch dimensions (without magnet) (mm) E

Stainless Steel One-touch Fittings Series KG

C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No. L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

VFR3000-OMJ0001

VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) ) ) ) DC 5m 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 6 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Ser Ser Ser Series ies ies ies 5 5 5 5 / / / / 3 30 ( ) 1 ()VG32 2 ()ISO VG32 7 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series / Series / Series / Series / 1 1 1 1 E,

Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, WATER, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, .51440 lb, ModelApplicable flow rate sensorFlow rate measurement

Switching from real-time flow rate to accumulated flow is possible.Space saving, Applicable to e-con, Multiple sensors (max. 4 pcs.) can be managed collectively , Improved enclosure protection, Multi-function, Improvement in operability, CONTROLLER, AIR, INSTRUMENTATION, IF/PFA FLOW SWITCH, 2X, IF/PFA NO SIZE ALL OTHERS, .48933 lb, ModelApplicable flow rate sensorFlow rate measurement

The LEKFS*G slider is the high performance version of the standard LEKFS*E.  This motor upgrade improves the maximum work load, maximum acceleration, and maximum velocity compared to the standard motor.  Lower cycle times can be realized with the higher performance.  All other features of the LEKFS*E are included.

The LEKFS*G slider is the high performance version of the standard LEKFS*E.  This motor upgrade improves the maximum work load, maximum acceleration, and maximum velocity compared to the standard motor.  Lower cycle times can be realized with the higher performance.  All other features of the LEKFS*E are included.

The LEKFS*G slider is the high performance version of the standard LEKFS*E.  This motor upgrade improves the maximum work load, maximum acceleration, and maximum velocity compared to the standard motor.  Lower cycle times can be realized with the higher performance.  All other features of the LEKFS*E are included.