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(The above graph shows the value when V port is 8.) Port size Flow rate characteristics of V to PV (Vacuum side) PV port V port C[dm3/(sbar)] b Cv 6 8 0.39 0.14 0.09 11.3. Vacuum Release Flow Rate Characteristics The graph shows the flow rate characteristics at different supply pressures when the vacuum break flow adjusting needle is open from the fully closed state.

IP40 050 -1070 () 3585% RH() AC1000 V50/60Hz1 5 M(DC500 V) 2%F.S.(25 ) 3 2.7 3 m / 2 0.15 mm 0.8 mm CERoHS M5 R06 R07 M50.8 6 1/4 inch ONBR SUS304 PBT (3 m) 41 g 38 g 7 g 3.8 g -12No.PS-OME0003CN-F [V] A B C 0-101kPa 0 -101 kPa 10.1 kPa -101101kPa -100 kPa 101 kPa 0101kPa 0 101 kPa -10.1 kPa -01MPa 0 1 MPa -0.1 MPa -13No.PS-OME0003CN-F PSE53-M5 PSE53R06 R07 (D) PSE53-

(same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

Moment Nm Load N Load N Load N Piston speed m/s Piston speed m/s Moment Nm Piston speed m/s Piston speed m/s Moment Nm Piston speed m/s Piston speed m/s Allowable kinetic energy horizontal Mounting Vertical Mounting Load N Load N Piston speed m/s Piston speed m/s 19 5-4 Example of selection .

Note2) Fixed units: Instantaneous flow rate: L/min Accumulated flow: L Connectable remote type sensor unit is PF2W5--1 (with analog output 1 to 5 V).

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 connector type)

NPN PNP 2 OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 2.0ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2 4 030 s/0.01 -86No.PS-OMV0008CN-E ISE70G ISE75G ISE76G ISE77G ISE78G IP67 AC500 V 1 50 M(DC500 V ) -570() -550-1060() 3585RH() CE UL/CSA(E216656)CE EMC RoHS EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms

:; HS 71 .5 77 84 1.5 0 1.5 A 24.5 23 24.5 B DA4 type o 82.5 95 ~ H s 88 c==._~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

(P.20) < Applicable Auto switches > Solid state switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed switch D-A90(V)A93(V)A96(V) How to mount and move the auto switch Fig. 8 Note 1) For the tightening of the mounting screws (M2.5), use a precision screwdriver with a handle diameter of approximately 5 to 6 mm.

V V S With V y Pilot port size * Port size: 14 only Select Nil for 06 and 10.

L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations 604 AS Series Flame Resistant (Equivalent to UL-94 Standard V-0)/Speed Controller with One-touch Fittings Elbow Type Construction M5 type M5 type Meter-in type Meter-out type w !

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

or less 2.4 V (to 20 mA)/ 3.5 V (to 50 mA) 0.8 V or less Indicator light Red LED lights when ON.

NPN ) NPN 1 V (80 mA )PNP 1.5 V (80 mA ) 1 s(50 ms0.5 s2 s) 1.5 s 15 V 1 k 420 mA 600 DC24 V 50 5F.S. -54No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 ()30 ms 3F.S.() LED 3 7 2 (/) OUT1ON OUT2ON DC24 V10 55 mA IP40 050 () 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) CE(EMC ROHS )ULCSA 110L/min10009.99 L/min 2100L/min100099.9 L/min 3 ()10024 551005009.5 221002003.8

(Er1,2) () ( ) (Er1,2) (Er0,4,6,7,8,9) DC1230 V DC1230 V (Er0,4,6,7,8,9 ) 6 "HHH" (HHH) "LLL" (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) DC1230 V DC1230 V DC(+) DC(-) 7 -76No.PS-OMV0003CN-G No.