CP95 1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts No.
Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across
0 o w !6 !5 !4 !3 y r t !1 A A Enlarged view of A Component Parts Description No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Standard Manifold body Aluminum Brass q Retainer Manifold base Coil assembly Aluminum Aluminum Brass w e r Class H molded t y Stainless steel, Copper Stainless steel Class B molded Core assembly Armature Stainless steel, Silver Gasket NBR FKM/EPDM u Stainless steel FKM/EPDM Polyacetal, NBR Valve assembly i Return spring O-ring o Stainless steel !0 NBR FKM/EPDM Support spring !
Hysteresis mode P. 879 P. 877 I U Input impedance Insulation resistance Internal voltage drop Unit conversion URJ P. 877 P. 879 V K Vacuum breaking pressure Vibration resistance Voltage resistance Key lock mode P. 877 P. 879 L W Leakage current LED level meter Liquid contact part Load Load current Load impedance Load lock chamber Load voltage Window comparator mode P. 879 Z P. 877 Zero out
1 u t w y CHK CHN CHM CHM CHS CH2 o !
Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31
N None 1 2 n T 7 Digital Gap Checker With Control Unit ISA3 Series 3-Color Display RoHS How to Order G C N M B 2 ISA3 L 1 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm 2 port solenoid valve Rated voltage Piping specifications Output specifications Nil 24 VDC 1 *11 100 VAC 2 *11 110 VAC *11: Made to Order N NPN output P PNP output Supply side Detection side Unit
CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !
O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122
Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.
Output form O: 1SHOT output H: HOLD output C: COMPARE output Reading pre-scale setting Command Block # 0 0 P R [CR] Unit No. Command Check sum code Response Block # 0 0 P R [CR] Unit No. Command Response Status Check sum code data Response data details 1 0 0 0 0 0 1 1 Multiplication Pre-scale value Decimal point position Writing pre-scale setting Command Block # 0 0 P W [CR] Unit No.
It varies depending on operating pressure.Refer to ''Flow Characteristics" p.4.6-29 and figure of "Max. air flow" p.4.6-28. Removes odor and gas ingredients in compressed air.
(ZSE/ISE30A) P Reduction in setting w Reduction in setting work ork P Pre Prevention of mistakes in setting vention of mistakes in setting P Reduction in setting work P Prevention of mistakes in setting Cop Copy Copy 1 switch Slave pressure switch Master pressure switch (source of copy) 2 switches 10 switches 3-step setting -step setting 3-step setting 1 2 3 Push Push Adjust to the set-value
+ 0.1) to 0.9, P: Operating pressure 0.1 to 0.9 3 position (0.6 x P + 0.1) to 0.9 P: Operating pressure Ambient and fluid temperature (C) 10 to 60C (No freezing.
56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 5-5-16 5 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA54231 83.9 26.1 Rc 1/8 3.5 NO NC (PA
How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported
g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole
Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?