sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Motor capacity 200W 100W 200W 100W 5 to 40C 5 to 50C 5 to 40C 5 to 50C Operating temperature range Electric power 640VA 300VA 640VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction

Dedicated Controller

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Motor capacity 200W 100W 200W 100W 5 to 40C 5 to 50C 5 to 40C 5 to 50C Operating temperature range Electric power 640VA 300VA 640VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction

Electric Actuator with Integrated Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Motor capacity 200W 100W 200W 100W 5 to 40C 5 to 50C 5 to 40C 5 to 50C Operating temperature range Electric power 640VA 300VA 640VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction

CC

Instead, use an individual CC valve unit or a speed controller (AS2000, AS3000, AS4000, etc.) through a pipe connection. 1.05MPa Proof pressure 5 to 50C Ambient and fluid temperature Turbine oil (40 to 100cSt) Fluid 40mm Nominal size Converter standard effective oil level stroke/effective volume Standard effective oil level stroke (mm) 50 100 150 200 300 Effective volume (cm3) 60 120 180

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(1) 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 20 Hz 5 Hz Individual EXH Common exhaust Pilot valve EXH Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated voltage 10% of rated voltage Allowable