Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

MY2

Do not allow short circuit of loads. 42 Series MY2 Auto Switch Precautions 3 Be sure to read before handling. Operating Environment Maintenance Warning Warning 1. Never use in an atmosphere of explosive gases. 1. Perform the following maintenance periodically in order to prevent possible danger due to unexpected auto switch malfunction.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

CE

81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W

CE2

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C GA H1 FF GL F GD D E E GC M BB J BL C CC D EE GB K AA AL Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

C76

Auto Switch Mounting Height (mm) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C Bore Hs Hs Hs 32 31.5 31 28.5 40 35.5 35 32.5 Aim at this number. 6-10-42 43 Auto Switch Series C76 Applicable Auto Switch Auto switch model Lead wire length (mm) Load voltage Indicator light Wiring (Output) Electrical entry Applicable load Type Special function Rail mounting 0.5 () 3 (L) 5 (Z) None

CJP

6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52 83 67 68 57 47 42

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44 44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order . Specifications. Construction. Dimensions . Made to Order Specification . Related Products . About New air cushion mechanism.

CXT

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

MGC

22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30

Compact Cylinder

current CDQS series, 25, 10 mm stroke) CAT.ES20-239C JCQ Series Compact Cylinder JCQ Series Compact (Compared with the current product) [mm] Bore size CDQS JCDQ Weight 29 g 33% weight reduction 23 Weight 43 g 25 12 23 + Stroke 23 25.5 + Stroke 25 24% volume reduction Weight 37 g 35% weight reduction 26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42%

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Element upward removal Element upward removal Differential pressure indicator Threaded Differential pressure indication switch Note) Element Note) N.C. and N.O. common 41 Flange Hydraulic fluid Construction 42 only P M Paper Micromesh Indicates 42 for 3.5 MPa, Port sizes 3/4 and 1.

Modular F.R.L. Units

Nil Rc N NPT F G + Nw Pipe thread type D 01 1/8 02 1/4 03 3/8 Ne By-pass port size Model By-pass port size A B C D E Applicable model Specifications By-pass port size for redirecting air flow AKM2000-A 1/8, 1/4 40 28 11 40 11 AC20-B, AC20A-B Model Effective area [mm2] AKM2000-A 28 AKM3000-A 55 AKM4000-A 111 E AKM3000-A 1/8, 1/4 53 34 14 48 13 AC25-B AC30-B, AC30A-B AKM4000-A 1/4, 3/8 70 42

33

5.7 4.3/5.4 For option -T: 4.7/5.8 Rated power consumption (50/60 Hz) Note 3) kVA 0.58/0.74 For option -T: 0.66/0.82 0.73/0.86 For option -T: 0.81/0.94 0.85/1.02 For option -T: 0.93/1.10 Dimensions Note 8) mm W377 x D435 x H615 For option -T: W377 x D500 x H615 Accessories Fitting (for drain outlet) 1 pc., Operation Manual (for installation/operation) 1 Weight Note 9) kg 35 For option -T: 42

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 600 4 Port Direct Operated Poppet Solenoid

Model: VPA500, Exhaust Type: Common Exhaust, Stations: 5 Stations, Symbol: 1, Port Size: 3/8, Thread Type: -

Model: VPA500, Exhaust Type: Common Exhaust, Stations: 2 Stations, Symbol: 1, Port Size: 3/8, Thread Type: -