AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

: Grommet type (lead wire: 3 m), Output Specification: NPN open collector 1 output / without analog output / 3 turn adjustment, Female thread compatible: With M5 female thread, : 00010: R

Digital Flow Switch (Integrated display type)

Flow rate at normal condition 0.927 = Flow rate of standard condition -40No.PF-OMG0010-H Dimensions (in mm) PF2A703H/706H/712H Model A B C D E F G PF2A703H 55 mm 160 mm 40 mm 92 mm 67 mm 55 mm Rc1, NPT1, G1 PF2A706H 65 mm 180 mm 45 mm 104 mm 79 mm 65 mm Rc11/2, NPT11/2, G11/2 PF2A712H 75 mm 220 mm 55 mm 114 mm 89 mm 75 mm Rc2, NPT2, G2 Model H I J PF2A703H 36 mm M5 x 0.8 8 mm PF2A706H 46

VXA21/22

Construction/ Principal Parts Material Operating Fluid and Ambient Temperature Operating fluid temperature (C ) Ambient temperature (C ) Normally closed (N.C.)

NAIV

Slt/C Pneumatics (Canada) Ltd (Windsofl 2870 Jelferson BLVD Unit 1 Windsor, ON NBT 312 TEL; (519) 944-0555 FAX: (519) 944-1870 INDIA SMC Pneumatics (lndia) pvt., Ltd.

CRB2-OM00001

(2) C is integration constant.

Moisture Control Tube

Be careful not to bend or flatten the tube and the inner sleeve even if the value is more than the minimum bending radius. 2 Inner sleeve R How to Order IDK 02 100 Moisture control tube O.D.

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

LEJ-OM002xx

Check the product for the following points before operation. a) Damage to power supply line and signal line. b) Looseness of the connector to each power line and signal line. c) Looseness of the actuator /cylinder and controller /driver mounting. d) Abnormal operation. e) Emergency stop of the total system. 3.

Vacuum Module: Ejector System Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

3 Port Solenoid Valve Compact Direct Operated Series S070

3 Port Solenoid Valve Compact Direct Operated Series S070 How to Order Valve Body type Body type Base mounted with screws Symbol B 2 3 Port size Sub-plate Without sub-plate Symbol Nil M3 M5 With sub-plate S070 B 5 B G Base mounted S070 C 5 B G 32 Body ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H

Air-hydro Unit

Converter size Cylinder bore size (mm) Cylinder piston speed (mm/s) Step (4) Select the size of valve unit 310 or more 32 CCT40 200 or more 40 Using data (C), as a reference, select the size of a valve unit by determining whether it meets the desired cylinder operating speed.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

VPA4

Ambient and fluid temperature (C) 0 to 60 Lubrication (1) Required (Use turbine oil Class 1 ISO VG32.) Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32).

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification: K (w/Certificate

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certification