MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Plug-in type with terminal block (one.pc. type iunction co/er):NW5FF2-01T 1Graiom-)t@ Bottom porting Nw5FR2-01T1 Gtationsl2. @ Piot oper-ato, ExH Dorl Erecircar e,it ;;o"jn1,q\;ti5r_i o53.s) inch j:1.10X n +1.85 '=28 xn+ L,:1.10xn+2.20 (La=28xn+56) Series NVFRz00O:Base Mounted ftPe Blank plate W h e n d i s a s s e m b l i n g v a l v e f o r maintenance purposs or when spare manifold stations

-fl Seies

Plug-in type with terminal block (one.pc. type iunction co/er):NW5FF2-01T 1Graiom-)t@ Bottom porting Nw5FR2-01T1 Gtationsl2. @ Piot oper-ato, ExH Dorl Erecircar e,it ;;o"jn1,q\;ti5r_i o53.s) inch j:1.10X n +1.85 '=28 xn+ L,:1.10xn+2.20 (La=28xn+56) Series NVFRz00O:Base Mounted ftPe Blank plate W h e n d i s a s s e m b l i n g v a l v e f o r maintenance purposs or when spare manifold stations

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

s m 2.

AC Servo Motor Driver (Pulse input type/Positioning type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

VZS

Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve B side solenoid White: B Red: COM Lead wire color Lead Wire Color Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve (1) B side solenoid White: B Red: COM Lead wire color Lead wire length: 0.6 m 3-7-4 5 Series

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

MXS Series Air Slide Table

Buffer Specifications Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 6 8 12 16 20 25 Bore size (mm) Horizontal mounting 2-20 in/s (50~500 mm/s) 2-12 in/s (50~300 mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 0.67 1.12 2.25 2.92 3.82 4.72 Buffer stroke load (lbf) 1.35 1.80 2.92 3.82 5.62 6.52 Note) Refer to P. 14 for cautions on buffer.

MHY2/MHW2

D-Y7 W N B D-Y7BA D-Y69 A B D-Y7 WV N B Protrusion [mm] In-line Perpendicular A B D-Y59 O MHW2-20D S 7 12 5 12 12 O MHW2-25D S 7 11 5 10 11 O MHW2-32D S 4 9 2 8 9 O MHW2-40D S 3 8 1 7 8 Hysteresis Switch operating position (ON) O MHW2-50D S 1 6 5 6 Switch return position (OFF) N B D-Y7BA Auto switch model No. Gripper model No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg m s m s Type of impact s m 1 2 m2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D L A * M . t W ) f g ( 6 9 . 0 ) 5 . 4 2 ( 1 8 . 0 ) 5 . 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 / 1 S 4 3 7 0 H R K 9/ 6 1 ) 9 2 . 4 1 ( 3 6 . 0 ) 6 1 ( 1 1 5 7 . 0 ) 9 1 ( 6 1 4 / 1 S 5 3 7 0 H R K 8 9 . 0 ) 5 2 ( 4 / 1 8 / 3 S 6 3 7 0 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 7 . 0 ) 5 . 8 1 ( 8 2 0 4

Compact Type Dual-Rod Cylinder Series CXSJ

9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

15

M3E Y m x g From the results above, Find the value M3Emax when Va = 350 mm/s from Graph (11) b. n = 0.72 1, so the cylinder can be used. n = 1 + 2 + 3A + 3B = 0.07 + 0.19 + 0.37 + 0.09 = 0.72 Judgement [Graph 5] Allowable load mass by stroke 25 [Graph 9] Allowable load mass on guides m 400 100 B 10 Load mass m [kg] Load mass m [kg] C CY3B CY3R 100 CY1S25-Z 1 y, Z = 100 CY1S CY1S 0.1 CY1L

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

3

L S 1.0 x 101 B A 1 = m1 + m1 S 2 A2 + B2 12 A 2 Calculate the moment of inertia of the clamping jig. 2 = m2 + m2L2 D2 Arm: 1 Arm weight: m1 8 D when the cylinder bore size is 32.