Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Grommet/2 wire Connector/2 wire Reed No D-R80 D-S79 Grommet/3 wire (NPN) D-S7P Solid state Yes Grommet/3 wire (PNP) D-T79 Grommet/2 wire, Connector/2 wire A connector type is not available for solid state 3 wire switches.

MRQB-OM0002

11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46 27 32 10 4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41(41.5) 41.5 80190 31.5(32) 32 ( ) : D-A72A7HA80H 25 7. 7. 7. 7. 7.1 7.2 (7.1)A A ON A B A OFFB ON (7.2)A A ON A B A OFFB ON 26 8. 8. 8. 8. 8-1

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

22 3.2 6 8 10 12 3.2 4 6 8 10 31.5 32 35 39 43 D VT Color: White VP VG L DIN rail VP 12.5 (Pitch) 5.25 7.5 AXT100-DRS070 As for , enter the number from the DIN rail dimensions table. 25 35 5.5 VQ 12.5 L Dimension L = 12.5n + 10.5 VKF Each manifold can be mounted on a DIN rail.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

AR20-B to AR60-B

-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output, Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output, Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] *1 Assembly of a bracket and set nuts.

VXP21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 AC VXP21 DC 50 45 20 60 40 15 AC VXP22 DC 50 60 25 60 50 20 AC VXP23 DC Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C ) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (D) (S) 99 100 183

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

: 0.5 to 300mm/s Piston speed Minimum Strokes for Auto Switch Mounting Unit: mm D-A9, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M5 type U10/32 type Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

SFOD-OMT0005CN

RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven

180

90 Seal kit MHY10-PS MHY16-PS MHY20-PS MHY25-PS <16, 20, 25> !7!8!9@0 MHY2-D MHY2-D2 MHY-A1001 MHY-A1601 MHY-A2001 MHY-A2501 Finger assembly ro MHY-A1001-2 MHY-A1601-2 MHY-A2001-2 MHY-A2501-2 <10, 16> e!2 Joint assembly MHY-A1002 MHY-A1602 MHY-A2002 MHY-A2502 <20, 25> e!2!3 <10> wy!1!4 Piston assembly MHY-A1003 MHY-A1603 MHY-A2003 MHY-A2503 <16, 20, 25> wy!1!4!

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

PSxx-OMH0002CN

(Full span Full-scale) O PLC DC1224[V] ON-OFF 1 NPN OFF PLC PLC 2 NPN ON PLC PLC ON-OFF ON-OFF NPN PNP 1 NPN OFF ON-OFF PLC DC1224[V] 2 NPN ON R R.D. 1.0005R.D. 1.0005 = 0.05 0.8005R.D. 0.8005 = 0.04 S SUS ON-OFF ON OFF ON-OFF 25[]0 50[]-550[] )3.0[F.S.]25[] 100[kPa] F.S.=100-0=100[kPa] 3.0F.S.=1000.03=3[kPa] 050[] 3[kPa] -10No.PS-OMH0002CN-D () () 25[]ON-OFF )100

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

MDHR3-10 1122MDHR3-15 1122H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. protrusion of auto switch from edge of body: L, H Max. protrusion of auto switch from edge of body: H (mm) (mm) D-M9 D-M9V D-M9V Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-M9. 2.3 H 939 Rotary Actuated Air

OMR0031

CN5: Parallel I/O Connector . 25 7.1 Parallel I/O connector specifications . 25 7.2 Parallel I/O specifications . 25 7.3 Parallel I/O circuit (NPN, PNP) . 25 (1) Parallel I/O input circuit . 25 (2) Parallel I/O output circuit . 26 7.4 Parallel I/O signals (Step Data input type) . 27 7.5 Parallel I/O signal cable (Step Data input type) . 31 7.6 Parallel I/O connector wiring (example) . 32

3 Port Air Operated Valve Series SYJA300

) (18) 46 (For mounting) 2-M3 x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.