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Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

Doc.No.LFE*-OMZ0012 Product Name Electromagnetic Digital Flow Switch Remote Type Model/ Series/ Product Number LFE#(Z) SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definition and Terminology 14 Mounting and Installation 15 Installation 17 Piping Method 18 Wiring 20 Maintenance and Inspection 22 Troubleshooting 23 Specifications

M3 0.610.63Nm 1) 12mm 10mm -10- 2)L L 4 -11- L (M3X6)L :0.610.63Nm M3 -12- L L M3 (M3X6) :0.610.63Nm 3) :0.610.63Nm 90 -13- 4)DIN L :0.610.63Nm (M3X6)L :0.610.63Nm DIN :0.610.63Nm -14- 5) :0.610.63Nm 3 M3 L DIN -15- 4 4 4 4-3. 3. 3. 3. 1 +24V 2 GND 3 OFF 4 ONOFF OFF 5 0N 6 OFF 7 ON 8 1 ON 9 2 ON ()D ON NPN:GND ONOFF PNP:24V ONOFF NPN:(GND )ONOFF

O O O 12 13 14 8 VN*-OMJ0001-B Revision history Renewal PU Renewal PX 1st printing : JW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN*-OMJ0001-B

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: AT (Rubber Stopper, Retraction End), Functional Option: Standard Type, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber VACUUM PAD, ZP, ZP2, ZP3. Vertical Vacuum Inlet, w/adapter. 2.30000 lb. M30.

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber VACUUM PAD, ZP, ZP2, ZP3. Vertical Vacuum Inlet, w/buffer. 13.60000 lb. M30.

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: L (Symmetric Type), Stroke: 10mm, Adjuster: CS (Metal Stopper, Extension End)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Body Size: 6 (1/2 Basis), Port Size: F04 [Cylinder Side (R(PT)1/2) Pilot Port (G(PF)1/4)], Applicable Tube OD: 13 (Ø1/2")

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 13 (Ø1/2")

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 13 (Ø1/2"), Lock Nut: J (Round)

Applicable Tube OD: 13 (Ø1/2"), Free Flow Direction: B (One-touch Fitting to Male Thread), Thread: N (NPT), Port Size: 04S (1/2, R)

Applicable Tube OD: 13 (Ø1/2"), Free Flow Direction: A (Male Thread to One-touch Fitting), Thread: N (NPT), Port Size: 04S (1/2, R)

Applicable Tube OD: 13 (Ø1/2"), Free Flow Direction: B (One-touch Fitting to Male Thread), Thread: N (NPT), Port Size: 03S (3/8, R)

Applicable Tube OD: 13 (Ø1/2"), Free Flow Direction: A (Male Thread to One-touch Fitting), Thread: N (NPT), Port Size: 03S (3/8, R)