MU

Spring extend 40 50 63 2.4-1 Plate Cylinder/Double Acting Single Rod Series MU 25, 32, 40, 50, 63 How to Order Standard MU B 25 30 D M MDU B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches Mounting S n 2 1 n B L F G C D Basic Axial foot Front flange Rear flange Single clevis Double clevis Without auto switch(built-in magnet) Auto switch Applicable Auto Switches

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B B B B B 65.4 4-Rc(PT)1/8 (P, R port) Manual override 2n-M3 X 0.5 (A, B port) Depress and turn to operate and lock override.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

One-touch Fittings Series KQ2

KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

LECP6_C

OFF OFF ON OFF OFF C OFF OFF OFF ON OFF D OFF OFF OFF OFF ON E OFF OFF OFF OFF OFF *ALARM SVRESETON SVRE SETON A RESET B RESET C RESET D OFF (1) RESET(1) E OFF OFF 1 SV1.00 SETON OFFSETUP(2) -1 RESET SVRE ONRESET SVON ON 2 SETUP 48 - 12.2 code 12 12 0 1-048 B RESET -+ W 1W 2 W 12 0 1-049 PARA B RESET 1-050 B RESET No.

Transfer

717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C11.2 1218 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Side Support Side support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB MY1B 2 x J MY1H MY1H MY1B E A B C D MY1M MY1C (mm) MY1H Part no.

SFOD-OMT0005CN

ON OFF D ON OFF OFF OFF ON E ON OFF OFF OFF OFF SVRESETON IO SVRE SETON B RESET C RESET D OFF RESET,SVON E OFF OFF D 1 DSVREOFF(OFF) 2 RESET()SVON SVREON(ON) -62- 15.2 (code)*1 <> () (1)12 (12 0 ) (2) (3) (4) (5) (6) (7) (01-048) B RESET <> <> () (-)(+) W 1W 2 (W 12 0 ) (01-049) PARA B RESET <> <>No.

Heavy Duty Stopper Cylinder

Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 89 A A B Section BB Coupling P.C.D.

MGC

, B8 D-B73C D-B80C D-G7, K7 D-K79C D-B5, B6 D-G5lW D-K59W D-G5BAL D-G59F D-H7lW D-H7lF D-H7BAL D-C7, C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-C73C D-C80C D-B59W D-H7 D-H7C Bore size Hs Hs Hs A 21.5 (29.5) A B 20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18

Soft Start-up Valve

Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled

VNB

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Proper Auto Switch Mounting Position (Detection at stroke end) MX A B MTS MY MY3A D-A9, D-A9V (mm) D-F9W, D-F9(W)V (mm) D-M9, D-M9V (mm) CY A B Operating range Bore size 16 25 40 63 A B Operating range Bore size 16 25 40 63 B Operating range Bore size 16 25 40 63 A 088.5 084.5 26.5 084.5 22.0 26.5 2 06.5 3.0 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOB~sjze (mh''' d, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.