Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations Construction AS2000E/3000E AS4000E AS ASP u ASN i r AQ e y t ASV q AK !

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

L (Example) F8NL 5m . Z (Example) F8NZ Auto switches marked with a "" symbol are produced upon receipt of order.

Rated Flow Range: 0.5 to 4 L/min, Flow Adjustment Valve: w/Flow Adjustment, Port Size: TSJ3/8, Compression Fitting, Output Specification/Temperature Sensor: Out 1: NPN; Out 2: Flow Rate Analog 4-20 mA; Temperature: Analog 4-20 mA; w/Temperature Sensor, Lead Wire: with Lead Wire with M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C, Bracket

2% F.S. or less, allowable load resistance: 100 k or moreCurrent output Note 6) 4 to 20 mALinearity: ?2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: KT (OUT1: Analogue 4 to 20 mA - OUT2: Analogue 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 06 (3/4), Output Specification/Temperature Sensor: KT (OUT1: Analogue 4 to 20 mA - OUT2: Analogue 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: KT (OUT1: Analogue 4 to 20 mA - OUT2: Analogue 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C),

The MGPM/L-XC8 is an adjustable extend stroke type where the MGPM/L-XC9 allows for stroke adjustment on the retract stroke. The MGPM/L-XB13 is a compact body actuator integrated with internal guide shafts with the ability to operate smoothly at low speeds (5 to 50mm/s).

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature:

Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve; Stop Valve: None), Return Port Size: 03 (3/8), Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment), Port Size: 03 (TSJ3/8, Compression Fitting), Output Specification/Temperature Sensor: DT (Out 1: NPN; Out 2: Flow Rate Analog 4-20 mA; Temperature: Analog 4-20 mA; w/Temperature Sensor), Lead Wire: with Lead Wire with M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L

The MGPM/L-XC8 is an adjustable extend stroke type where the MGPM/L-XC9 allows for stroke adjustment on the retract stroke. The MGPM/L-XB13 is a compact body actuator integrated with internal guide shafts with the ability to operate smoothly at low speeds (5 to 50mm/s).