IR30-OM00013

SU P.

PSxx-OMF0005CN

DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (

ZSE5/ISE5

I The dual output applies to NPN, -O~P7:~iP~tio~n~-'-~p~a~m~No~.-.~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

ISO Interface

SMC Corporation of America (Detroit) 2990 Technology Drive Rochester Hills, MI 48309 TEL: (248) 299-0202 FAX: (248) 293-3 w w w . s m c u s a . c o m SMC CORPORATION OF AMERICA U.S. HEADQUARTERS 3011 N. FRANKLIN ROAD INDIANAPOLIS INDIANA 46226

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e r t y u i o !

ASD

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Vacuum Gripper

Vacuum pressure Theoretical lifting force Horizontal lifting force [N]Safety factor 1/4 [kPa] [N] 1 cup gripping -50 40.2 10.0 2 cups gripping -67 53.8 13.4 3 cups gripping -73 58.7 14.6 (Calculated by W = P X S, S = r2, r = 32 / 2. Refer to 3.3 How to calculate theoretical lifting force for the detail.)

VQD1000

2 W 3.2 W (Energy saving type) Power consumption DC (Inrush: 3.2 W, Holding: 2.4 W) L plug connector, M plug connector (With indicator light and surge voltage suppressor) Electrical entry M plug connector Base mounted M plug connector Body ported Note 1) Based on JIS B 8375-1981.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

3

2 q w e r t y !1 !0 o i u Component Parts No.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Micro Mist Separator

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

VZM400

5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

OMS0020

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B