High Vacuum L Type Valve

Refer to Chapter 3, Product Specific Precautions 3 (P. 7 to 8) and Chapter 5, Construction and Dimensions (P. 11) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced. 4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table. 5.

LECA6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

VNB

Description Material Bronze Note Clear coated Cover assembly Body q Platinum silver painted Aluminum alloy Brass w e Plate assembly Valve element Piston assembly Return spring Pilot solenoid valve Valve material (NBR, FKM, EPR) Stainless steel or brass Valve material (NBR, FKM, EPR) r t y u Aluminum alloy Piano wire Note) Parts e and r are for selection of valve composition.

3 Position Cylinder Series RZQ

GR-L-010 (10 g) D-X Individual -X 1225 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3 x P (Port size: Rc, NPT, G) FA Q FB H effective thread depth C G I D E M K Z a a A + Full stroke L B + Full stroke M K J E W T RA 4 x O1 effective thread depth RB 4 x O1 Section a-a Basic style (Through-hole): RZQB 32, 40 Washer 2 x RR 2 x RH Flat washer: 2 positions (Included) b 2 x N 2 x

Series HAW Water Cooled Aftercooler 1

Description Material Flower fin tube assembly 42046 Aluminum Copper Carbon steel 42073 r 42054 42062 42036 Flower fin tube assembly 42012 Aluminum Copper, Carbon steel 42022 w Packing Packing Packing Packing Non-asbestos Non-asbestos 42013 42015 t 42013 42015 42032 42042 42045 42047 42042 42045 42047 42072 y u Packing 42047 42042 42045 V # 6401 V # 6401 V # 6401 42035 42037 42074 i y 14-

Digital Pressure Switch

Display/Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Display/Min. setting unit 0.1 kPa 0.001 MPa Proof pressure 500 kPa 1.5 MPa Power supply Power supply voltage 12 to 24 VDC10%, ripple max. 10% (p-p) spec.

Digital Pressure Switch

Display/Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Display/Min. setting unit 0.1 kPa 0.001 MPa Proof pressure 500 kPa 1.5 MPa Power supply Power supply voltage 12 to 24 VDC10%, ripple max. 10% (p-p) spec.

Fluoropolymer Piping Equipment

e q With reducer i y u Part lists Material Description No.

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Compact Cylinder

1 w i q !5 y 50, 63 Basic Type Description No. Material Component Parts Rod end male thread Note !

ZL112A

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

Thermoelectric Bath

Standard item Reference item [mg/L] 50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness [mg/L] 50 or less Calcium hardness (CaCO3) [mg/L] 30 or less Ionic state silica (SiO2) p p p p p p [mg/L] 0.3 or less Iron (Fe) [mg/L] 0.1 or less Copper (Cu) Should not be detected.

MHZ2/MHZJ2

P-77.5 (JT)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)