NCA1

1 1/4 1 1.71 2.36 3.78 5.78 5.78 200 (2) 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 1.26 0.34 1 3/4 1 1.71 2.4 3.82 5.82 5.82 250 (2.5) 5/8 7/16-20 3/4 3.1 3/8 3 1/8 1 5/8 1 9/16 1/8 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.3 0.34 2 1/4 1 1.75 2.48 3.98 5.98 5.98 325 (3.25) 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 1.25 3/4 11/64 1.5 1/2 7/8 3/8-24 3.75 0 1/

0.4

For valve weight, refer to page 9.

ZP

Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

5

Applicable bore size A A1 E1 LB MM NDH10 NX R1 U1 I-020B 20 46 16 20 36 M8 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 Bore size A H MM NDH10 NX1 U1 R2 Y Z 20 18 41 M8 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 11 66 Low Speed 25, 32 22 45 M10 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 14 69 I-032B 25, 32 48 18 20 38 M10 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 MQ 40 24 50 M14 x 1.5 12 +0.070 0 16 0.1 0.3 20 14 13 92 I-040B

Magnetically Coupled Rodless Cylinder

9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

1

7 9 9 0 0.052 0 0.062 0 0.062 0 0.062 40 2 28 63 (5.7) 9 7 9 9 Data 50 2 35 Throttle hole diameter in the head side for long stroke is the same dimension as rod side.

Table of Contents

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

HRX-OM-R026

Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRSH090-A-20. 9-1 9.1.2 HRSH090-A-40. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090-A-20/40. 9-7 9.2.2 HRSH090-W-20/40. 9-8 9.3 Flow diagram . 9-9 9.3.1 HRSH090-A-20/40. 9-9 9.3.2 HRSH090-W-20/40. 9-9 9.4

A_HEC-OM-K001

Appendix . 9-1 9.1 How to order and manufacturing code indication . 9-1 9.1.1 How to order . 9-1 9.1.2 Manufacturing code indication . 9-2 9.2 Specifications . 9-3 9.2.1 Specification table . 9-3 9.3 Outline Dimensions . 9-5 9.3.1 HED003-C2* Temperature Controller . 9-5 9.3.2 HED003-HW* Heat Exchanger . 9-6 9.3.3 HED005-C2* Temperature Controller . 9-7 9.3.4 HED005-HW* Heat Exchanger . 9-

MNB

13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.

MNB

6-11 12 Series MNB Construction $3 #8 @9 $9 !

Swivels

1.88 1-5/16-12 1-5/16-12 95.0 mm 66.2 mm 41.3 mm 47.6 mm UN-2A UN-2A Male SAE O-Ring Straight Thread Female 37 Flare A Part Number A B Hex 1 Hex 2 Port 1 Port 2 B PS410506-4-4 2.76 1.94 .75 1.19 7/16-20 7/16-20 70.0 mm 49.3 mm 19.0 mm 30.2 mm UNF-2A UNF-2B Hex 2 Hex 1 PS610506-6-6 2.94 2.00 .88 1.31 9/16-18 9/16-18 74.6 mm 50.9 mm 22.2 mm 33.3 mm UNF-2A UNF-2B Port 1 Port 2 PS810506-8-8

ZP

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Free Mount Cylinder Series CU

115 131 D3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 7 9 12 16 20 24 6 6 7.5 9 9 10 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 13 16 16 19 23 27 10.5 11.5 15.5 19.5 24.5 30.5 -X Individual -X Technical data Note 1 ) 5 stroke (CUKW16-5D): GA = 14.5 Note 2) The two chamfered positions for the double rod type are not identical. 509 Free Mount Cylinder

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

MY1

9 Note) With top cover removed !

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Air Cylinder

16 1 1/8 5 5/8 6 2 3/16 150 (1.5") 1 1.71 2 2.36 6 1/16 3/8 3 5/8 7/16 5/8 1/8 1.26 5/16-24 3/8 1 7/16 1.84 1.06 3/4 3/8 2.6 0.3 3/8 1 1/8 1 1 3/4 7/16-20 9/16 1 1/8 5 5/8 6 2 11/16 200 (2") 1.71 1 2 1/2 2.4 6 3/16 3/8 3 5/8 9/16 5/8 1/8 1.3 5/16-24 3/8 1 5/8 1.06 2.19 3/4 3/8 3.1 0 1 1/8 3/8 1 2 1/4 7/16-20 9/16 1 1/8 6 1/8 5 3/4 3 1/8 250 (2.5") 1.75 1 3 2.48 6 5/16 3/8 3 3/4 9/16 5/8 1

HRX-OM-Z002

Documents . 9-1 9.1 SPECIFICATIONS. 9-1 9.1.1 HRLE050-A-20. 9-1 9.1.2 HRLE090-A-20. 9-2 9.1.3 HRLE050-W-20. 9-3 9.1.4 HRLE090-W-20. 9-4 9.1.5 HRLE090-A-40. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090

HRX-OM-T002

Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRS090-A-20. 9-1 9.1.2 HRS090-A-40. 9-2 9.1.3 HRS090-A-46. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant with GWP reference . 9-7 9.1.8 Communication specification . 9-7 9.2 Outline dimensions . 9-8 9.2.1 HRS090-A-20/40/46-. 9-8 9.2.2 HRS090-W-20/40/46-. 9-9 9.3 Flow diagram . 9-10 9.3.1 HRS090-A-20