CJ5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !

CJ5-S

3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

MHZ

6 r t u q @3 !3 @0 !9 !8 y Single acting/Normally closed @1 Double acting/With fingers closed Replacement Parts Description Material Note Component Parts Description MHZJ2-6 Main parts No. Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Aluminum alloy Body q CR MHZJ2-J6 Stainless steel Piston w Material FKM Heat treated Dust cover !

MHZ

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

Compact Manifold Regulator

How to Order ARM11A 3 1 A M Z 07 q w e r t y u i N 1. Knob Position 2. IN/OUT Piping Position OUT side fitting Elbow Symbol Position Front Top Bottom IN side fitting Elbow Position IN side OUT side Symbol Bottom Top Bottom Top Top A B C Top Front Bottom 1 2 3 4 Top OUT side fitting Straight IN side fitting Straight Bottom Bottom 3. Regulator Block Stations 4.

IDG

Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VCA

36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q KPL04-00 20.7 4.5 18 3.5 3.5 3 10.4 4 KPL06-00 22.8 5.3 19.5 9 9 7 12.8 6 D KPL08-00 26.3 6 21.5 22 15 11 15.2 8 4.2 KPL10-00 29.4 6.8 24 35 25 16 18.5 10 M 8 KPL12-00 L 31.4 7.5 25 50 40 20 20.9 12 Note 1) D indicates the maximum diameter.

Environment

0 i o e r t q u !1 !2 !3 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4"

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Speed Controller with Indicator

3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

4 q y r !3 !2 t o w e !0 !5 !6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) No. Description Material Note Component Parts No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

3 w i !7 !4 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) No. Description Material Note Component Parts No. Description Material Note (MIW25, 32) Hard anodized Aluminium alloy Body Carbon steel Cylinder roller !1 q (MIW8) Piston assembly Carbon steel Clip !

Cylinder with Lock Series MNB

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 3 Cylinder with Lock Double Acting: Single Rod Series MNB Construction #3 $9 !3!4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !