Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 10 20 27 + Stroke 15.5 29 42.5 + Stroke 10 5 20 5.5 18 Note 3) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M8 x 1.25 47 1 25.5 10 36 Rod end nut 12 Flat washer 8 15 14 7 7 10 25.5 29.5 + Stroke 18.5 36 48 + Stroke 13 5 25 5.5 19 Note 4) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

PA3000/5000/PAX1000

(A) 2 N.O. N.C. N.O.

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Card Motor

Features 2 Series LAT3 Model Selection 1 Selection Procedure for Positioning Operation (Refer to Front matter 3 and 4 for Fig.1, 2, 3, 4, 5 and Table 1, 2, 3 .)

5 Port Solenoid Valve SY Series

position single 10 or less 10 or less 13 or less 2 position double 15 or less 16 or less 20 or less 3 position Type R, U Type S, Z 33 or less 38 or less 2 position single 27 or less 28 or less 30 or less 2 position double 50 or less 50 or less 56 or less 3 position SY9000 SY5000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) With light/surge voltage suppressor

Digital Pressure Switch

Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs.) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs.)

Digital Pressure Switch

(Hysteresis mode, error output, switch output off) (Window comparator mode) -45No.PS-OMU0009-D 2 value display The 2 value display function displays the items listed below on the right and left side of the sub display.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Digital Pressure Switch

(Hysteresis mode, error output, switch output off) (Window comparator mode) -43No.PS-OMU0003-D 2 value display The 2 value display function displays the items listed below on the right and left side of the sub display.

Digital Pressure Switch

(Hysteresis mode, error output, switch output off) (Window comparator mode) -44No.PS-OMU0006-D 2 value display The 2 value display function displays the items listed below on the right and left side of the sub display.

Micro Mist Separator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc AD47-2-A AD47-D G G NPT AD47N-2(Z)-A NPT AD47N(-Z)-D Appearance and part No.

Mist Separator

Semi-standard: 6W Piping port (4) Part No. thread ty pe Rc C3SF-6W-A G NPT C3SF-6W(Z)-A Option symbol 2 2J Semi-standard symbol Semi-standard: 2 Semi-standard: 2J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C3SF-2J-A C3SF-2-A G G C3SFF-2J-A NPT C3SF-2(Z)-A NPT C3SFN-2J(Z)-A Appearance and part No. -13- Option symbol 8 8J Semi-standard symbol Semi-standard

LFE-OMY0008

4-20mA Rc 1 2 3 N NPT 3 3/8 F G 4 1/2 6 3/4 8 1 11 No.LFE*-OMY0008 M12 M12 / / / / M12 LFE-1-A3 3 m 175g LFE-1-D LFE1 (310) 4 45g LFE-2-D LFE2 (310) 4 70g LFE-3-D LFE3 (310) 4 70g 12 No.LFE*-OMY0008 M12 M12 M12 M12 4 4 4 4 M12 IN OUT ( ( ( (2 2 2 2 ) ) ) ) ( ( ( ( ) ) ) ) UP UP UP UP SET SET SET SET DOWN DOWN DOWN DOWN (2 ) () OUT1OUT2 ON : UP ON/OFF SET DOWN ON/OFF 13 No.LFE

XL-OMY0001

11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA-16 2.4mm 7mm -25 3mm 8mm -40 4mm 10mm -50 5mm 13mm -63 -80 6mm 17mm < 2 < 15 XL-OMY0001 7-3. 1 2 XLA-16/25 2 2 Nm XLA-16 0.9 -25 1.5 -40 2.5 -50 6.3 -63 -80 14 2< 2 3 1 1 4 1 2 2 1

Return Filter

Prior to the shipment of a SMC product to 2. Check the law for pressure vessels or opera 2. Check the law for pressure vessels or opera 2. Check the law for pressure vessels or opera 2. Check the law for pressure vessels or opera 2.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Load Black Blue Relay Black Blue Load Switch 1 Switch 1 Switch 1 Load Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Relay Switch 2 Switch 2 Indication lights up when both switches are ON. 2-wire (2 pcs.)

Soft Start-up Valve

VAC 100 VN SY100-82-2-01 200 VAC 200 VN SY100-82-2-02 110 VAC (115 VAC) 110 VN SY100-82-2-03 220 VAC (230 VAC) 220 VN SY100-82-2-04 When making connections, please note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards.

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x