Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector w/o Cable, Surge Suppressor: None, Manual Override: Manually Operated, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: Manually Operated, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector w/o Cable, Surge Suppressor: Light & Surge Suppressor, Manual Override: Screwdriver Operated Style, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Manually Operated, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

Lock-Up Valve IL201/211/220 Series

9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !

90

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

Residual Pressure Release Valve

with a push button guard: KEB Release time S Release time of pressure in the cylinder Body (Red) Residual pressure release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Turntable Cylinder Series MGT

N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246 267 291 221 250 80 MGTL 180 192 205 220 237 255 154 62 MGTM 271 288 307 328 353 382 321 356 100 F MGTL 242 257 274 292 313 335 153 114 3 Series MGT Construction Section A A A A Description Material Note

Rotary Actuator NCRA1 Series Single Rack and Pinion

q NC G RA1B with Auto swllch cap"ou,O J T With Auto Swllch Capsbiliry J | | D-withbuin-inmasner J I &-*"-l See above Bor See above ,f The stsrda|d liead wire length is 18 inches. "L' is addecl for 10loot long lead wire. E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NcRAl/n".x and Pinion ryp Symbol \ -D \ l ?

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

How to Calculate Flow (At an air temperature 20C) 1P1+0.1013<1.89(P2+0.1013) Q=226S P(P2+0.1013) Piping 2P1+0.10131.89(P2+0.1013) 1Completely flush (air blow) pipes before plumbing to remove dust. 2Clamping torgue: Q=113S(P1+0.1013) Q:Flow rate under standard conditions [ /min (ANR)] P1:Upstream pressure (MPa) P2:Downstream pressure(MPa) P:Pressure differential(P1-P2)(MPa) S:Effective area

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

VVXA21/22

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

NCRAI seies

q NC G RA1B with Auto swllch cap"ou,O J T With Auto Swllch Capsbiliry J | | D-withbuin-inmasner J I &-*"-l See above Bor See above ,f The stsrda|d liead wire length is 18 inches. "L' is addecl for 10loot long lead wire.

The SYJ Valve is an innovative combination of space efficiency and performance superiority which provides real value to the design solution. Whether designed in a manifold or used as a single valve, this small profile increases design flexibility and minimizes space requirements. The SYJ valve utilizes a low power (0.5 watts standard) pilot solenoid design, which dramatically reduces thermal