ZVB20_E_

Ionizer Functions -13- 3. Ionizer Functions 3.1 Functions 1. Name and description of indication LEDs PWR ION / HV NDL Symbol Color Description Contents PWR Green Power supply indicator LED is ON when the power supply is ON; LED flashes when the power supply or CPU is abnormal.

ZVB40_E_

Ionizer Functions -13- 3. Ionizer Functions 3.1 Functions 1. Name and description of indication LEDs PWR ION / HV NDL Symbol Color Description Contents PWR Green Power supply indicator LED is ON when the power supply is ON; LED flashes when the power supply or CPU is abnormal.

High Vacuum L Type Valve

Period and Scope of Warranty 13 7. Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Caution 13 - Rotary Actuator How to Use the Air-hydro Type Caution on Design Do not use a rotary actuator of the air-hydro type near flames, or in equipment or machinery that exceeds an ambient temperatures of 60 . There is a danger of causing a fire because the rotary actuator of the air-hydro type uses a flammable hydraulic fluid.

Rotary Table

If the products kinetic energy of the load exceeds the allowable value, it could damage the product, and cause a hazard to humans and damage the machinery and equipment. 13. Provide a shock absorber if the kinetic energy that is applied to the product exceeds the allowable value.

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

Electric Actuator / Slider Type 《 AC Servo Motor 》

. * For LECSS, please set the electronic gear with PC, PLC etc. in your application. 13 - LECSB-T LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial Parameter *1,*2 Para value Recommended Value No Number of command input pulses per revolution *3. PA05 10 10 Electronic gear numerator *3.

SI unit for DeviceNet ®

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

CEx-OMB0060

Output terminals Bank No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 [ For binary output ] The table below shows correspondence of preset numbers (1 to 31) and output terminals (OUT 1 to 5) in binary output. A smaller preset number is outputted when outputs are overlapped.

ATX-OM-F004E

Outer dimensions and descriptions of each part part 2) Descriptions of each part HAA7 to 22 24 12 15 5 HAA37 11 22 23 13 7 9 10 4 21 28 29 30 1 13 19 8 25 27 17 3 14 Components of aircooled aftercooler and descriptions No.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

During the autotuning noise may occur, the noise will stop when the tuning is complete. -21- 13. When mounting the actuator using the body mounting reference plane, use the pin. And set the height of the pin to be 5mm or more because of R chamfering.

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

(See Fig.13 and Fig.14.) Fig. 13 Fig. 14 Stopper bolt stroke adjustment (MY1HT series) Insert the hexagon wrench from the top and loosen the hexagon socket head set screw for 1 turn. Then, adjust the stopper bolt using a flat blade screwdriver. After the adjustment, fix the stopper bolt using the hexagon socket nut.

Air cylinder

Construction Figure-4 125 to 160 Table. 13 Parts list No.

LEJ-OM002xx

. * For LECSS, please set the electronic gear with PC, PLC etc. in your application. 13 - 2.

Clamp Cylinder

Refer to pages 13 to 15 for precautions and specifications of auto switch. Note 2) The auto switch mounting position is temporarily set at the time of shipping from our factory. Change it to the desired position in accordance to your facility.

Series MLGP

MLGPM--B: When used as stopper 13 - 9. Manual unlocking Warning 1) Do not perform unlocking while an external force such as a load or spring force is being applied. This is very dangerous because the cylinder will move suddenly.

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

Parallel Type Air Gripper

Finger assembly Piston assembly 13 - 3-4. Construction / Parts list, seal list MHZJ2-6 Double acting/ Finger open Single acting / Normal open Single acting / Normal closed Double acting/ Finger closed Components Components No. Description Material Remarks No.

MHT2

40 50 63 Refer to page 12-13-1 for further information on other auto switches.

3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5