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Warning Connection thread size (R,NPT) Proper tightening torque (N m) 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 3/4 28 to 30 6 No.VQC5000V-OMU0002 Precautions for 5 Port Solenoid Valve 4 4 4 4 VQC5000 Series Be sure to read before handling. Refer to main text for detailed precautions on every series.

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

SOLENOID SPECIFICATIONS Adder Number 0 1 Required Amplifier VEA1 30, VEA131 vEA 250, 251 ,252 Control Range 0-750mA 0 1 A Coil Resistance 26]2 (68"F (20"C) ) 1312 (68"F (20'C)) PorYer Consumotion 15W Max. Current (68"F (20"C) ) 13W Max. Current (68"F (20'C)) Insulation Class H Max. TempeEture Rise 284'F (140"C) at Full Current Elec-trical Connection DIN Connector (h" PF) NVEF.

MT.01 MT.01MT.05 MANT screen CODE No.20 Contact output signal 3 function ALM *1 D.OUT3 Setting function of contact output signal 3. screen SEL Contact output signal 3 operation No.21 B A/B D.OUT3 Setting output operation of contact output signal 3. screen TYPE D.OUT3 No.22 Contact output signal 3 alarm AL.01 AL.01AL.32 Setting selected alarm of contact output signal 3.

[April 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2021 SMC Corporation All Rights Reserved No.PS-OMV0009-E

NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 8 - Precautions for use with non-SMC Caution (1) When using the KFG2 series with tubing other than those from SMC, the products are not subject to warranty. 3.

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

MALAYSIA PHILIPPINES SINGAPORE SOUTH KOREA TAIWAN THAILAND VIETNAM NORTH AMERICA CANADA MEXICO USA SOUTH AMERICA ARGENTINA BOLIVIA BRAZIL CHILE COLOMBIA ECUADOR PERU VENEZUELA OCEANIA AUSTRALIA NEW ZEALAND LATVIA LITHUANIA NETHERLANDS NORWAY POLAND ROMANIA RUSSIA SLOVAKIA SLOVENIA SPAIN / PORTUGAL SWEDEN SWITZERLAND TURKEY UNITED KINGDOM Pressure Relief 3-Port Valve with Locking Hole VHS 20

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

Solenoid on side A 0 2 4 6 8 16 28 30 2 3 1 SV24 V +24 V for valve 5 2 SV0 V 0 V for valve Side D Side U URL http://www.smcworld.com 1 4 3 SW24 V +24 V for input (SI unit side) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SW0 V 0 V for input 4 Output No.

Ce priphrique a galement t valu et dmontr conforme aux limites d'exposition aux RF d'IC dans des conditions d'exposition des appareils mobiles (antennes sont suprieures 20 cm partir du corps d'une personne). When product comply with IFETEL inquire below warming statement has to be contained in user manual.

Nominal thread size Tightening torque Rc(NPT)3/8 15 to 20 Nm Do not touch the piping or its connected parts when the fluid is at high temperature. It may lead to burnt. Ensure the piping cools sufficiently before touching.

If the installation is using accurate control, wait until the product has warmed up (approximately 20 to 30 minutes). 2 s button (DOWN) Easy setting Function selection mode Attaching the connector to the sensor wire Strip the sensor wire as shown to the right. (Do not strip the wire insulation) 20 mm or more Cover Output OUT1 LED (Green): LED is ON when OUT1 is ON.

.: ZVB-D3A) ZVB-AC1) ZVB-P1A) -10- Dust collecting bag 3 m exhaust duct hose Dust collecting bag Appearance of the product with the options mounted 2.3 Construction 1 19 4 3 5 2 12 6 8 14 9 15 7 13 16 10 11 17 18 20 Component parts No. Description Remarks No.

Circulating fluid Water, Ethylene glycol solution up to 20% Description No. Signal Style and Part No. Tank capacity Approx. 110mL Pump capacity Refer to performance chart.

-100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002 VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

If this occurs, wait until the oil temperature rises by a warm-up operation, and confirm if the differential pressure indicator and switch can be reset, then start the operation. (20 oC or more is the guide.)