VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

3 Port Solenoid Valve

To remove the station, follow the same procedure for assembly and disassembly. 21 Series S070/Specific Product Precautions 3 Be sure to read before handling. Refer to pages 16 through 19 for safety instructions, precautions.

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

VKF300

Port Direct Operated Poppet Solenoid Valve SeriesVKF300 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Series VKF300 Compact with large flow rate Body width 18mm Cv0.25 (Standard: Base mounted type) Cv0.20 (Standard: Body ported type) Various manifold piping directions Output port: Manifold set-up allowing 360 rotation of 2(A) entry direction (in 90 increments) Types 20 and 21

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

VXA21/22

20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

NVKF

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

NVZseies

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VV3K* NO SIZE RATING, VALVE, VV3K* MANIFOLD VK 3-PORT, 2J, VV3K* NO SIZE RATING, 0.57875 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VV3K* NO SIZE RATING, VALVE, VV3K* MANIFOLD VK 3-PORT, 2J, VV3K* NO SIZE RATING, 0.57875 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 6-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, MFLD ASSY, 7-STA, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, .95901 lb

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF5000 series manifold, Metric threads (Rc(PT)), Manifold type: B mount (single base), Maximum stations: 15, Port sizes

Series VF, a five port pilot solenoid valve, offers large flow capacity in a compact size. The VF is available in many variations including three types of manual override and four types of electrical entry. Common exhaust for main valve and pilot valve is also available.VF5000 series manifold, Metric threads (Rc(PT)), Manifold type: B mount (single base), Maximum stations: 15, Port sizes

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MFLD BASE, 5-STA, VALVE, VV*F* MANIFOLD VF SERIES, 2J, VV*F* NO SIZE RATING, 3.1967 lb

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Model d T1 T2 H1 H2 D1 D2 L1 L2 L3 L4 A * M ASP330F-01-06S-X369 R1/8 M5X0.8 12 8 14.2 20.4 27.5 13.6 38.6 35.2 13.5 6 11.6 ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/

AZ1000

pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21

Stroke Reading Cylinder and Counter

steel Aluminum alloy Hard chrome plated Head cover Hexagon socket head cap screw 3 17 Stainless steel Aluminum alloy Hard anodized Piston A Hexagon nut 4 18 Chromated Carbon steel Aluminum alloy Hard anodized Piston B Spring washer 5 19 Chromated Steel wire Aluminum alloy Hard anodized Piston rod Spring washer 6 20 Chromated Steel wire Carbon steel Hard chrome plated Tie-rod Hexagon nut 7 21