Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA Easily replaced filter element ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 7 7 12 16 19 22 22 30 40 62 20 20 30 75 100 3 16 1 4 1 4 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop. Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization.
Not applicable 1 Not applicable 1 Not applicable 1 1 Not applicable Turn the power off and on again. If the failure cannot be solved, contact SMC. 1 Displayed if an internal data error has occurred. System error 1 1 Not applicable 1 1 -77No.PS-OMW0005-C 1: The switch output will be OFF when an error is generated.
3 o @1 @0 !1 !0 !2 r w i e !5 !9 y u t MDHR3 !4 !3 q !1 @0 @1 w o e i MHZ2 !5 MHZJ2 MHQ r !7 !6 t !0 !8 !2 i !9 y u MHL2 Component Parts Component Parts MHR No. !2 !3 !4 !5 !6 !7 !8 !
Function A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 Function B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 View C COM IN 0 IN 1 IN 2 IN 3 DRIVE SVON NC NC NC DC2 (+) DC2 () BUSY ALARM OUT 0 OUT 1 NC NC NC NC Fused Fused (10) Color polarity indication (Red) B1 A1 B1 (Red) Counter cable [Counter cable] Controller Multi-counter LATH3 1 (6.8) Multi-counter side Controller side Cable length (L) 1 3 5 1 m (7) (7) 3 m (40
DXT083-13-1 Qty. 1 pc. VZ Hexagon socket head screw DXT083-19-1 2 pcs.
Connector for DIN Terminal VNB1 to 4 (Valve size 1 to 4) Vacuum pilot type is excluded VNB5 to 7 (Valve size 5 to 7) Vacuum pilot type (Valve size 2 to 7) Caution AC Terminal no.1 Coil Terminal no.2 DC Indicator light assembly Terminal no.1 (+,-) Coil Terminal no.2 (-,+) AC Indicator light assembly Terminal no.1 Coil Terminal no.2 DC pol Indicator light assembly Terminal no.1 (+) Coil Terminal
Description Qty 1 Rod cover 1 14 Wear ring 1 2 Head cover 1 15 Rod seal 1 3 Cylinder tube 1 16 Piston seal 1 4 Piston rod 1 17 Cushion seal A 1(2) 5 Piston 1 18 Cushion seal B 1(0) 6 Cushion ring A 1(2) 19 Cushion valve seal 2 7 Cushion ring B 1(0) 20 Cylinder tube gasket 2 8 Bushing 1 21 Bumper A 1(2) 9 Cushion valve 2 22 Bumper B 1(0) 10 Tie rod 4 23 Rod end nut 1 11 Tie rod nut 4 24 Magnet
7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.
1 !1 !2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.
Description Qty Note 1 BRAKE BODY 1 23 ROD COVER 1 2 BODY CAP 1 24 HEAD COVER 1 3 COLLAR 1 25 CYLINDER TUBE 1 4 HOLDER 1 26 PISTON ROD 1 5 BRAKE METAL 1 27 PISTON B 1 6 PISTON A 1 28 CUSHION RING 1 7 ROLLER HOLDER 1 29 CUSHION RING B 1 8 ROLLER PLATE 2 30 CUSHION VALVE 2 9 NEEDLE ROLLER 2 31 CUSHION SEAL HOLDER 1 10 PISTON SPRING 1 32 TIE ROD 4 11 ROLLER SPRING 1 33 TIE ROD NUT 8 12 BUSHING
Output impedance approx. 1 k Display 3 1/2 digits, 7-segment display, colour display (red) Display accuracy 2%F.S. 1 digit (at ambient temperature 253 oC) Indicator LED LED is ON when output is ON.
1 1 2 17-3-76 7 The VX series will be revised shortly.
4 0.5 14.9 6 14 0.1 9.9 3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 0.1 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 0.1 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.
7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5
Construction/ Main Parts 1 3 4 5 7 2 Main Parts Description Solenoid coil Body Fixed iron core Movable iron core ass'y Return spring Poppet Phillips/ordinary round head screw Interface gasket Subplate No. 1 2 3 4 5 6 7 8 9 Note Material Resin SUS SUS Resin SUS NBR Carbon steel NBR ZDC 6 8 AXT632-7-3 (M1.714) AXT782-11 AXT662-11 (1: M5,2:M3) 2 9 P A R 14 Operation Guide Series VQ100 Operating
Description Qty Note 1 BRAKE BODY 1 23 ROD COVER 1 2 BODY CAP 1 24 HEAD COVER 1 3 COLLAR 1 25 CYLINDER TUBE 1 4 HOLDER 1 26 PISTON ROD 1 5 BRAKE METAL 1 27 PISTON B 1 6 PISTON A 1 28 CUSHION RING 1 7 ROLLER HOLDER 1 29 CUSHION RING B 1 8 ROLLER PLATE 2 30 CUSHION VALVE 2 9 NEEDLE ROLLER 2 31 CUSHION SEAL HOLDER 1 10 PISTON SPRING 1 32 TIE ROD 4 11 ROLLER SPRING 1 33 TIE ROD NUT 8 12 BUSHING
AS568-025-XN1 7 XL-OMV0017 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.
Description Qty Note 1 BRAKE BODY 1 21 SEAL WASHER 1 2 BODY CAP 1 22 HEXAGON SOCKET CAP BOLT 4 3 COLLAR 1 23 ROD COVER 1 4 HOLDER 1 24 HEAD COVER 1 5 BRAKE METAL 1 25 CYLINDER TUBE 1 6 PISTON A 1 26 PISTON ROD 1 7 ROLLER HOLDER 1 27 PISTON B 1 8 ROLLER PLATE 2 28 CUSHION RING 1 9 NEEDLE ROLLER 2 29 CUSHION RING B 1 10 PISTON SPRING 1 30 CUSHION VALVE 2 11 ROLLER SPRING 1 31 RETAINING RING
AS568-025-XN1 7 XL-OMV0019 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.
2A 2B 2C 3 4 5 6 7 8 9 10 11 12 13 14 Anodized Anodized Anodized Anodized Chromated Hard chrome plated 1.