IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Industrial Filters

6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

3 Port Solenoid Valve/

release valve X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve with soft start-up function X555 VP 4 1 5 4 5 D Z 03 M Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

IDX-OM-W038

IDH*6 1 2 AME-EL350 3 AME-EL250 4 O 5 4.2 46 IDH Series I D XO M W 038 5 5 5. 1 O FF O FFO N 2-3 ( 1 /) ( ) 3-1, 3-2 -5+10% 600m m 2-3 ( 1 /) 4-4 IDH Series 51 5. 1 I D XO M W 038 5 4-1 2 3-1 4-1 6-1 N .

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

EX500-GPR1A.eng

) Ground terminal RxD/TxDN N.C. 3 RxD/TxDN RxD/TxDP RxD/TxDP4 5 Ground 4 +24V 2 +24V Shield 5 Shield N.C. 3 2 N.C. 2 N.C. 3 0V 1 0V 5 4 1 1 Internal circuit 8 0V 7 +24V 6 0V 5 +24V 4 TD 3 TD+ 2 RD 1 RD+ 8 0V 7 +24V 6 0V 5 +24V 4 TD 3 TD+ 2 RD 1 RD+ COM D COM A Common to IN side and OUT side Connect the communication cable with M12 connector to the M12 reverse communication connector.

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

IDX-OM-W011

-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-

IDX-OM-U021

1 4.2.3 V) . 4-4 4.2.4 . 4-4 5 5.1 . 5-1 5.2 . 5-3 5.3 R ) . 5-4 6 6.1 . 6-1 6.2 GWP . 6-1 6.3 . 6-2 6.4 . 6-5 6.5 . 6-7 6.6 . 6-8 7 7.1 . 7-1 2 IDX-OM-U021 i i i-1 () 5.2 OFF i-1-1 3 IDF100150F i-1 i-1 IDX-OM-U021 i i-2 IDF100150F i-2 i-2 IDX-OM-U021 i i-2-1 i-2-2 i-2-3 50 i-2-4 IDF100150F i-2 i-3 IDX-OM-U021 i i-2-5 0 i-2-6 WARNING !

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

CRBB-OM00004

screw 2 Fig. 1 8 Block retainer 2 7 Stopper block 2 No gap 6 Rubber bumper 1 5 Lever retainer 1 4 Stopper lever 1 3 Stopper ring 1 2 Auto switch 2 1 Rotary actuator 1 Product Fig. 2 No.

reduces flow setting time

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.