Nm (2)2 (M414)(EX600-ZMA2) 0.70.8 Nm (3)DIN DIN (4)DIN DIN (5)(M420)(EX600-ZMA2) 0.70.8 Nm -13No.EX-OMN0037CN-A M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) (EX600-ZT1) -14No.EX-OMN0037CN-A EX600-AX A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -15No.EX-OMN0037CN-A 1 24 V() 2 + 3 0 V() 4 5 FE M12 (4 ) 1 24 V 2 A/D DC24 V 3 0 V 4 5 FE FE
26.0 27.5 27.9 28 29.5 13 17 13 17 22 26 31 35 38 58 61 71 70 74 83 1/8" (3.18) 0.086" (2.18) 2 10 8 13.5 5 1.5 LQ L1 M L1 M 0.098" (2.5) 5/32" (4) 3 10 8 13.5 5 1.8 d MQR 1/4" (6.35) 5/32" (3.95) 10 10 12 15.2 6 3.3 A L2 T H2 16 H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 25 H1 IDK Connection thread 18 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 28 2 x Applicable tubing 36 1/2" (12.7) 3/8
socket case. (1) Panel mounting hole (Socket side with cover) Panel mounting hole (2) Stretch the cover to install on the cover installation latch. 4-4.5 M4 round head screw 50.5 69.5 SMC 6 1 8 2 3 9 10 46 25 34 11 4 12 5 7 11 43 55 Cover Cover installation latch 38 2
push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.
4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !
M8-Molex Conversion cable 1pc. 5 - 2.
21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50 100 150 200 250 300 350 400 Stroke MXY6 2 3 3 4 39 34 59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V)
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal; Temp
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
is of maximum 30 Vrms (42.4 V peak), with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer.
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?
C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22
0 535 LLB3 LLB4 5 100 5 107 IDFA Min. measured flow rate value Max. measured flow rate value 50 500 55 IDFB Connector pin numbers IDH 4 3 ID IDG 2 1 IDK Pin no.
5 to 60C Note 1)/?5 to 60C Note 1) (NBR seal)?5 to 60C Note 1)/?5 to 99C Note 1) (FKM seal)0.25 to 0.7 MPa?5 to 50C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)10.5 MPa?5 to 50C Note 1)20 times/minVertical upwards3/4?6.2 ?3/81/45.6100