Air Pilot Operated Series NVSA

To ehitt spool fully 12 (0.8) 25|n..n r00 (6.7) 12 (0.8) 5 (0.3) 5 (0.3) 10 (0.4 E 11 .71 10(0.7) 3. Maxlmum Permisslble 125 (8.3) 125(8.3) 125 (8.3) iledla: Alr (lubricated or oll-free), any non-flammabls, nontoxic, non-corrosive gasses except oxygen. Leakagq Port to port (intemal) not to exceed 0.030 cubic teet per minute at 100 PSIG (6.7 Kgf/cm').

CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Mass Standard Stroke (g) (mm) Body mass 80 105 100 160 130 210 210 320 640 830 Standard stroke 5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6 MXP8 MXP10 MXP12 MXP16 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 1 0-7 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 2 8-15 All enable Setting value FF 1 1 1 1 1 1 1 1 Output No. 23 22 21 20 19 18 17 16 3 16-23 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 31 30 29 28 27 26 25 24 4 24-31 Output 24-27: Disable Output 28-31: Enable Setting value F0 1 1 1 1 0 0 0 0

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

STAINLESS STEEL CYLINDER

Port side side Minimum stroke 10 20 75 15 3.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

Serial Network

-00 Fax: 01-64-76-10-10 South America Argentina Phone: 011-4555-5762 Fax: 011-4555-5762 ?

ZB-OM00301

A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

2-Color Display

Settings can be copied to up to 10 slave sensors at once. (Max. transmission distance: 4 m) Unit 1 Unit 2 Unit 10 1) The sensors are connected by a dedicated lead wire (ZS-38-5L (for master and one slave) or ZS-38-U (for master and up to 10 slaves)).

Pneumatic Transfer System Series MF

H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541 to 556 595 to 618 15 32 15 32 15 32 558 to 573 685 to 708 518 to 533 558 to 581

Digital Pressure Switch

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Magnetically Coupled Rodless Cylinder/Direct Mount Type: Both Sides Piping Type Series CY3R

Note 3) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 63: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112

3 Position Cylinder Series RZQ

102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

10-cy3r-e

Note 3) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 63: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112