3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Single AXT66114A Lead wire length 300mm 600mm 1000mm 2000mm 3000mm VQZ1000 VQZ1000-GS-5 VK AXT66113A Latching VQZ2000 VQZ2000-GS-5 6 10 20 30 DC (-COM) VQZ3000 VQZ3000-GS-5 VZ AXT66113AN Latching Note ) Above part number consists of 10 units. Each unit has one gasket and two screws. Orders are accepted in 10 units.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Vacuum Regulator

IRV10 P P P P IRV20 P P P P P P 6 8 10 1/4" 5/16" 3/8" Metric Note 1) Accessories are shipped together. Inch Bottom bracket Single sided connections IRV 20 A C08 Made to Order For details, refer to page 10.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 1 8 01 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 1 4 10-SY7000 02 02 03 2 position

Flow Sensor Series PFMV

2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Model: 10 (Side Ported), Number of Cores - Lead Wires: L1 (34 Cores), Lead Wire Length: 3 (3m), Valve Stations: 9 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 9 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 9 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10S6 (Side Ported), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 9 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), A, B Port Size: N7 (ø1/4" One-touch Fitting, Fixed)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), A, B Port Size: N7 (ø1/4" One-touch Fitting, Fixed)

Model: 11 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: FW (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)