RZQ

RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB RR RH T W E FA Z 32 100.5 82.5 14 22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5

60

Applicable air preparation equipment VHS20 VHS30 VHS40 VHS40-06 VHS50 Y200-A Y300-A Y400-A Y500-A Y600-A AC20-A AC25-A, AC30-A AC40-A AC40-06-A AC50, AC55 Note), AC60 Note) Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Note) VHS50 can be connected to AC55 and AC60.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ML1C

Applicable bore A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 1114 A Hy-rodless Cylinder ML1C Series Construction #9 %7 #8 #7 %6 !0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

D-F9BW(V), D-F9NW(V), D-F9PV (mm) B A 20Model Mounting Switch operating range A B A B A B 50 MXY6 Data 38 55 4 MXY8 43 63 MXY12 51 Mounting of Auto Switch Caution Auto Switch Mounting Tool When tightening the auto switch set screw (included with auto switch), use a watchmakers screwdriver with a handle diameter of about 5 to 6 mm.

Ejector Valve Unit Series ZYY/ZYX 1

2 Aluminum Diffuser ZYY3000-NPA Non plug assembly t !3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !

Body Size: 2000, Port Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Electrical Entry: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Flow Direction, Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Port Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Electrical Entry: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Flow Direction, Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Port Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Electrical Entry: D (Type D, DIN Terminal w/Connector), Surge Suppressor: None or Manual Override, Flow Direction, Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: G (Grommet, Lead Wire Length: 300mm), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: DO (Type D, DIN Terminal w/o Connector), Surge Suppressor: None, Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: None, Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: Y (Type Y, DIN Terminal w/Connector), Surge Suppressor: None, Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: G (Grommet, Lead Wire Length: 300mm), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: G (Grommet, Lead Wire Length: 300mm), Surge Suppressor: None, Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 4 [220 VAC (230 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: C (Push-turn Locking Lever Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 2000, Thread: N (NPT), Port Size: 02 (1/4), Option: None, Voltage: 3 [110 VAC (115 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)