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TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

When selecting a converter by its nominal diameter, the converter's oil level speed should be 0.2m/s or less. 300 25 600 500 400 100 200 20 300 CRA1H100-180 300 100 200 CRA1H100-90 200 150 CRA1H80-180 50 eSelect required function for valve unit 100 100 80 CRA1H80-90 Select a model from data , by determining the functions that

D-J51: 5ms or less MHZ2 Lead Wire Length MHZJ2 How to specify lead wire length MHQ (Example) MHL2 L D-A73 MHR Lead wire length 0.5m 3m L 5m Z N MHK MHS None Applicable to only connector type switch D-C MHC2 Note 1) Lead wire length Z: 5m Applicable to Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73 (C) (H)/A80C MHT2 Solid state switch: Made to order (Except D-F9, F9lV, F7lWV) D-A53/A54, D-Z73

M 24V 0V 0V (2) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 22 - 7.CN3 1 2 3 4 5 TM() 1 VDeviceNet 2 CAN_L CAN(L) 3 SHIELD 4 CAN_H CAN(H) TM() 5 V+ DeviceNet DeviceNet TMCAN_HCAN_L 1201% 1/4W 23 - 8.CN1IF(CONT) 8.1 (LEC)8 LEC-CG1-1LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin LEC-CG1b) M12 4pin b) M12 4pin

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3

4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front

z 1 . 7 a x.43 o 1 ) 2.24 (58) M26x1.51 5 7 a40) c 9 8 125\ 4.96 (126\ 1.42 140 l;$?'

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

46 - DC24VSVON a) b) c) d) e) 47 - D 100 154 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 48 - 155 5 156 49 - 16/ 161 / UL1310Class2 162 ON 50 - 5 () 51 - 163 50mm 164 () 52 - 165 166 D 100 167 53 - Revision history No.JXC-OMT0030CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are

0.1 14.5 B 2 S + Stroke 2 ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

capacity [cm3] 8 25 45 Bowl material Polycarbonate Bowl guard Standard (Polycarbonate) 5 m 80 100 180 230 200 310 370 Water drop removal type (-S) 40 m 100 130 210 340 230 390 500 80 m Recommended flow rate Note 5) [L/min (ANR)] 5 m 100 140 190 250 210 350 440 Large flow type (-T) 40 m 120 180 230 380 250 480 660 80 m Weight [kg] 0.08 0.18 0.36 Note 1) The size of solid particles collectable